公开(公告)号：US20100215513A1

公开(公告)日：2010-08-26

申请号：US12713136

申请日：2010-02-25

申请人： Hong-Seub KIM ,  Hyun-Soo PARK ,  Soon-Bin JUNG ,  Sung-Ho CHA ,  Dong-Jin KIM ,  Wook-Jung HWANG ,  Jin-Hyuk YOO

发明人： Hong-Seub KIM ,  Hyun-Soo PARK ,  Soon-Bin JUNG ,  Sung-Ho CHA ,  Dong-Jin KIM ,  Wook-Jung HWANG ,  Jin-Hyuk YOO

IPC分类号： F04B49/00 ,  F04B23/08

CPC分类号： H01L21/67161 ,  H01L21/67017 ,  H01L21/67167 ,  H01L21/67173 ,  Y10T137/86083 ,  Y10T137/86139

摘要： An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.

摘要翻译： 一种装置，包括在大气条件下的转印单元，其中具有机器人; 以及至少一个处理室，其连接到转印单元的一侧，其间具有槽阀，并且交替地在真空条件下和在大气条件下。

公开(公告)号：US20130320486A1

公开(公告)日：2013-12-05

申请号：US13786853

申请日：2013-03-06

申请人： Jin-Hyuk YOO ,  Dae-hyun Jang ,  Yoo-Chul Kong ,  Kyoung-Sub Shin

发明人： Jin-Hyuk YOO ,  Dae-hyun Jang ,  Yoo-Chul Kong ,  Kyoung-Sub Shin

IPC分类号： H01L23/48

CPC分类号： H01L27/1157 ,  H01L23/48 ,  H01L23/528 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11573 ,  H01L27/11582 ,  H01L29/0649 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a semiconductor device. The semiconductor device includes a conductive pattern disposed on a semiconductor substrate. First and second conductive lines disposed on the conductive pattern and located at the same level as each other, are provided. An isolation pattern is disposed between the first and second conductive lines. A first vertical structure passing through the first conductive line and conductive pattern is provided. A second vertical structure passing through the second conductive line and conductive patterns is provided. An auxiliary pattern passing through the conductive pattern and in contact with the isolation pattern is provided.

摘要翻译： 提供一种半导体器件。 半导体器件包括设置在半导体衬底上的导电图案。 设置在导电图案上并且彼此位于相同水平面的第一和第二导电线。 隔离图案设置在第一和第二导线之间。 提供穿过第一导线和导电图案的第一垂直结构。 提供穿过第二导线和导电图案的第二垂直结构。 提供穿过导电图案并与隔离图案接触的辅助图案。