Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
    1.
    发明申请
    Photomask cleaning using vacuum ultraviolet (VUV) light cleaning 审中-公开
    使用真空紫外线(VUV)清洁光掩模

    公开(公告)号:US20070012335A1

    公开(公告)日:2007-01-18

    申请号:US11184703

    申请日:2005-07-18

    IPC分类号: B08B3/12 B08B3/00 B08B6/00

    摘要: A multi-step cleaning procedure cleans phase shift photomasks and other photomasks and Mo-containing surfaces. In one embodiment, vacuum ultraviolet (VUV) light produced by an Xe2 excimer laser converts oxygen to ozone that is used in a first cleaning operation. The VUV/ozone clean may be followed by a wet SC1 chemical clean and the two-step cleaning procedure reduces phase-shift loss and increases transmission. In another embodiment, the first step may use other means to form a molybdenum oxide on the Mo-containing surface. In another embodiment, the multi-step cleaning operation provides a wet chemical clean such as SC1 or SPM or both, followed by a further chemical or physical treatment such as ozone, baking or electrically ionized water.

    摘要翻译: 多步清洁程序可以清洗相移光掩模和其他光掩模和含Mo表面。 在一个实施方案中,由Xe 2激子准分子激光器产生的真空紫外线(VUV)光将氧气转化为在第一清洁操作中使用的臭氧。 VUV /臭氧清洁后可以进行湿式SC1化学清洗,两步清洗程序可以减少相移损失并增加透光率。 在另一个实施方案中,第一步可以使用其它方法在含Mo表面上形成氧化钼。 在另一个实施方案中,多步骤清洁操作提供湿化学清洁例如SC1或SPM或两者,随后进一步进行化学或物理处理,例如臭氧,烘烤或电离水。

    Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
    2.
    发明申请
    Photomask cleaning using vacuum ultraviolet (VUV) light cleaning 审中-公开
    使用真空紫外线(VUV)清洁光掩模

    公开(公告)号:US20070012336A1

    公开(公告)日:2007-01-18

    申请号:US11392300

    申请日:2006-03-28

    IPC分类号: B08B3/12 B08B3/00

    摘要: A multi-sub-process cleaning procedure cleans phase shift photomasks and other photomasks and Mo-containing surfaces. In one embodiment, vacuum ultraviolet (VUV) light produced by an Xe2 excimer laser converts oxygen to ozone that is used in a first cleaning operation. The VUV/ozone clean may be followed by a wet SC1 chemical clean and the two-sub-process cleaning procedure reduces phase-shift loss and increases transmission. In another embodiment, the first sub-process may use other means to form a molybdenum oxide on the Mo-containing surface. In another embodiment, the multi-sub-process cleaning operation provides a wet chemical clean such as SC1 or SPM or both, followed by a further chemical or physical treatment such as ozone, baking or electrically ionized water.

    摘要翻译: 多子过程清洁程序可以清除相移光掩模和其他光掩模和含Mo表面。 在一个实施方案中,由Xe 2激子准分子激光器产生的真空紫外线(VUV)光将氧气转化为在第一清洁操作中使用的臭氧。 VUV /臭氧清洁后可以进行湿式SC1化学清洗,双子过程清洗程序可减少相移损失并增加透光率。 在另一个实施方案中,第一子方法可以使用其它方法在含Mo表面上形成氧化钼。 在另一个实施方案中,多次处理清洁操作提供湿化学清洁例如SC1或SPM或两者,然后进一步化学或物理处理,例如臭氧,烘烤或电离水。

    SIGNAL GENERATING APPARATUS FOR GENERATING POWER-ON-RESET SIGNAL
    3.
    发明申请
    SIGNAL GENERATING APPARATUS FOR GENERATING POWER-ON-RESET SIGNAL 审中-公开
    用于产生上电复位信号的信号发生装置

    公开(公告)号:US20120229182A1

    公开(公告)日:2012-09-13

    申请号:US13409091

    申请日:2012-02-29

    IPC分类号: H03L7/00

    CPC分类号: H03K17/22 H03K17/223

    摘要: A signal generating apparatus, for generating a power-on-reset signal, including a bias circuit and a power-on-reset signal generating circuit is disclosed. The bias circuit is for generating an output bias voltage, and includes at least one bipolar junction transistor (BJT), wherein a base terminal of the BJT is coupled to a collector terminal of the BJT, and the output bias voltage is related to an emitter-to-base voltage of the BJT. The power-on-reset signal generating circuit is coupled to the bias circuit, and is for generating a duplicated voltage by duplicating the output bias voltage, wherein the power-on-reset signal is generated according to the duplicated voltage.

    摘要翻译: 公开了一种用于产生包括偏置电路和上电复位信号产生电路的上电复位信号的信号发生装置。 偏置电路用于产生输出偏置电压,并且包括至少一个双极结型晶体管(BJT),其中BJT的基极端子耦合到BJT的集电极端子,并且输出偏置电压与发射极 到BJT的基极电压。 上电复位信号发生电路耦合到偏置电路,用于通过复制输出偏置电压来产生复制电压,其中根据复制电压产生上电复位信号。

    Blade structure for a radial airflow fan
    4.
    发明申请
    Blade structure for a radial airflow fan 审中-公开
    径向气流风扇的叶片结构

    公开(公告)号:US20070065279A1

    公开(公告)日:2007-03-22

    申请号:US11229637

    申请日:2005-09-20

    IPC分类号: F04D29/44

    摘要: A fan includes a hub rotatable about an axis and having an open end and a closed end, and a plurality of blades extending from the hub. Each of the blades has a leading side surface, a trailing side surface, an inner lateral edge corresponding to the open end of the hub, an outer lateral edge corresponding to the closed end of the hub, and a radial outer edge having opposite inner and outer ends connected respectively to the inner and outer lateral edges, and at least one end portion extending from one of the inner and outer ends toward both the axis and one of the inner and outer lateral edges.

    摘要翻译: 风扇包括可围绕轴线旋转并具有开口端和封闭端的轮毂和从轮毂延伸的多个叶片。 每个叶片具有前侧面,后侧表面,对应于轮毂的开口端的内侧边缘,对应于轮毂的封闭端的外侧边缘和径向外边缘,其具有相对的内侧和内侧 外端分别连接到内侧和外侧边缘,以及至少一个端部部分,其从内端部和外端部中的一个端部朝着两轴线和内外侧边缘中的一个延伸。

    Cable installation assembly
    6.
    发明授权
    Cable installation assembly 失效
    电缆安装组件

    公开(公告)号:US08465300B2

    公开(公告)日:2013-06-18

    申请号:US13232914

    申请日:2011-09-14

    申请人: Chih-Cheng Lin

    发明人: Chih-Cheng Lin

    IPC分类号: H01R4/66

    CPC分类号: H01R24/86

    摘要: A cable installation assembly includes a connector, a power wire, a ground wire and two signal wires. The connector includes a base, having a plurality of terminal containing grooves formed in the base and arranged separately adjacent to each other. The power wire includes a power core and a power terminal electrically coupled to power core, and each power terminal is plugged into each corresponding terminal containing groove. The ground wire includes a grounding core and a grounding terminal electrically coupled to the grounding core and plugged into the terminal containing groove. The signal wire includes a signal core and a signal terminal electrically coupled to signal core, and the two signal terminals are plugged into the terminal containing grooves respectively and not arranged adjacent to each other, so that signals can be transmitted without interfering with one another.

    摘要翻译: 电缆安装组件包括连接器,电源线,接地线和两根信号线。 连接器包括基部,其具有形成在基部中并且彼此分开相邻布置的多个端子容纳槽。 电源线包括电源芯和电连接到电源芯的电源端子,并且每个电源端子插入每个对应的端子容纳槽中。 接地线包括接地芯和接地端子,电接地接地芯并插入到端子容纳槽中。 信号线包括信号芯和电耦合到信号芯的信号端子,并且两个信号端子分别插入到包含槽的端子中,并且不彼此相邻布置,使得可以传输信号而不会彼此干扰。

    Cable connector joint fastening structure
    7.
    发明授权
    Cable connector joint fastening structure 失效
    电缆连接器接头紧固结构

    公开(公告)号:US08328574B1

    公开(公告)日:2012-12-11

    申请号:US13209429

    申请日:2011-08-14

    申请人: Chih-Cheng Lin

    发明人: Chih-Cheng Lin

    IPC分类号: H01R4/38

    摘要: A cable connector joint fastening structure includes a male connector, a female connector, and a fastener. The male connector includes a male terminal body with a male terminal joint, a freely rotating screw sleeve locked around the external periphery of the male terminal joint. The female connector includes a female terminal body with a female terminal joint, and an insert space formed in the female terminal joint for inserting the male terminal joint, and the screw sleeve is screwed and coupled to the female terminal joint. The fastener includes a pivot portion formed at an external side of the female connector, and a locking arm pivotally installed onto the pivot portion, extended towards the male terminal body, disposed across the screw sleeve, and locked to the male connector.

    摘要翻译: 电缆连接器接头紧固结构包括阳连接器,阴连接器和紧固件。 公连接器包括具有阳端子接头的阳端子体,围绕阳端子接头的外周锁定的自由旋转的螺旋套筒。 阴连接器包括具有阴端子接头的阴端子体,以及形成在阴端子接头中用于插入阳端子接头的插入空间,螺纹套筒螺纹连接到阴端子接头。 紧固件包括形成在阴连接器的外侧的枢转部分,以及枢转地安装在枢转部分上的锁定臂,朝向阳端子主体延伸,跨过螺钉套筒设置并锁定到阳连接器。

    Electronic vehicle license and a reading and writing control device therefor
    8.
    发明申请
    Electronic vehicle license and a reading and writing control device therefor 审中-公开
    电子车辆许可证及其读写控制装置

    公开(公告)号:US20090251287A1

    公开(公告)日:2009-10-08

    申请号:US12078882

    申请日:2008-04-08

    申请人: Chih-Cheng Lin

    发明人: Chih-Cheng Lin

    IPC分类号: H04B7/00

    CPC分类号: G06Q10/10 G07C9/00007

    摘要: An electronic vehicle license is installed on a vehicle to store a record and insurance data of the vehicle, and a reading and writing control device is provided for an authority/official organization to read and write data into the electronic vehicle license; the electronic vehicle license includes a storage unit, a non-contact transferring unit, and a central processing unit; the reading and writing control device includes a central controlling unit, which has a weight assigned thereto in accordance with a jurisdiction of the authority that is authorized to use the reading and writing control device so that the central controlling unit is allowed to handle certain categories of data; the reading and writing control device further includes an encrypting and decrypting unit, a non-contact transferring unit, and a displaying unit to show the data of the vehicle license.

    摘要翻译: 在车辆上安装电子车辆许可证以存储车辆的记录和保险数据,并且向权威/官方组织提供读写控制装置以将数据读取和写入电子车辆许可证; 电子车辆许可包括存储单元,非接触式传送单元和中央处理单元; 读写控制装置包括中央控制单元,其具有根据授权使用读写控制装置的授权的管辖权分配的权重,使得中央控制单元被允许处理某些类别的 数据; 读写控制装置还包括加密和解密单元,非接触式传送单元和显示车辆许可证的数据的显示单元。

    Method for patterning micro features by using developable bottom anti-reflection coating
    10.
    发明授权
    Method for patterning micro features by using developable bottom anti-reflection coating 有权
    通过使用可显影的底部抗反射涂层来图案化微观特征的方法

    公开(公告)号:US07341939B2

    公开(公告)日:2008-03-11

    申请号:US11061056

    申请日:2005-02-18

    IPC分类号: H01L21/4763

    摘要: In the manufacture of a semiconductor, a DBARC layer is deposited upon a wafer to prevent reflection. A photo resist layer is deposited upon the DBARC layer and the wafer is selectively exposed to irradiation. The irradiation generates photo acid (H+ ions) in the exposed areas of the photo resist and DBARC. In order to provide better resolution in the DBARC for micro-features, an electric field is generated vertically through the coated wafer before or during post exposure baking (PEB) to create a uniform vertical distribution of H+ ions though the DBARC. The coated wafer is then developed to remove either the unexposed portions, or exposed portion of the DBARC. The cavities formed by the developer have side walls that are substantially vertical as a result of the uniform vertical distribution of the H+ ions.

    摘要翻译: 在制造半导体时,将DBARC层沉积在晶片上以防止反射。 光致抗蚀剂层沉积在DBARC层上,并且晶片被选择性地暴露于照射下。 照射在光致抗蚀剂和DBARC的曝光区域产生光酸(H +离子)。 为了在DBARC中为微特征提供更好的分辨率,在后曝光烘烤(PEB)之前或期间,通过涂覆的晶片垂直产生电场,以通过DBARC产生H +离子的均匀垂直分布。 然后将涂覆的晶片展开以除去DBARC的未曝光部分或曝光部分。 由显影剂形成的空腔由于H +离子的均匀垂直分布而具有基本垂直的侧壁。