摘要:
A multi-step cleaning procedure cleans phase shift photomasks and other photomasks and Mo-containing surfaces. In one embodiment, vacuum ultraviolet (VUV) light produced by an Xe2 excimer laser converts oxygen to ozone that is used in a first cleaning operation. The VUV/ozone clean may be followed by a wet SC1 chemical clean and the two-step cleaning procedure reduces phase-shift loss and increases transmission. In another embodiment, the first step may use other means to form a molybdenum oxide on the Mo-containing surface. In another embodiment, the multi-step cleaning operation provides a wet chemical clean such as SC1 or SPM or both, followed by a further chemical or physical treatment such as ozone, baking or electrically ionized water.
摘要:
A multi-sub-process cleaning procedure cleans phase shift photomasks and other photomasks and Mo-containing surfaces. In one embodiment, vacuum ultraviolet (VUV) light produced by an Xe2 excimer laser converts oxygen to ozone that is used in a first cleaning operation. The VUV/ozone clean may be followed by a wet SC1 chemical clean and the two-sub-process cleaning procedure reduces phase-shift loss and increases transmission. In another embodiment, the first sub-process may use other means to form a molybdenum oxide on the Mo-containing surface. In another embodiment, the multi-sub-process cleaning operation provides a wet chemical clean such as SC1 or SPM or both, followed by a further chemical or physical treatment such as ozone, baking or electrically ionized water.
摘要:
A signal generating apparatus, for generating a power-on-reset signal, including a bias circuit and a power-on-reset signal generating circuit is disclosed. The bias circuit is for generating an output bias voltage, and includes at least one bipolar junction transistor (BJT), wherein a base terminal of the BJT is coupled to a collector terminal of the BJT, and the output bias voltage is related to an emitter-to-base voltage of the BJT. The power-on-reset signal generating circuit is coupled to the bias circuit, and is for generating a duplicated voltage by duplicating the output bias voltage, wherein the power-on-reset signal is generated according to the duplicated voltage.
摘要:
A fan includes a hub rotatable about an axis and having an open end and a closed end, and a plurality of blades extending from the hub. Each of the blades has a leading side surface, a trailing side surface, an inner lateral edge corresponding to the open end of the hub, an outer lateral edge corresponding to the closed end of the hub, and a radial outer edge having opposite inner and outer ends connected respectively to the inner and outer lateral edges, and at least one end portion extending from one of the inner and outer ends toward both the axis and one of the inner and outer lateral edges.
摘要:
A cable installation assembly includes a connector, a power wire, a ground wire and two signal wires. The connector includes a base, having a plurality of terminal containing grooves formed in the base and arranged separately adjacent to each other. The power wire includes a power core and a power terminal electrically coupled to power core, and each power terminal is plugged into each corresponding terminal containing groove. The ground wire includes a grounding core and a grounding terminal electrically coupled to the grounding core and plugged into the terminal containing groove. The signal wire includes a signal core and a signal terminal electrically coupled to signal core, and the two signal terminals are plugged into the terminal containing grooves respectively and not arranged adjacent to each other, so that signals can be transmitted without interfering with one another.
摘要:
A cable connector joint fastening structure includes a male connector, a female connector, and a fastener. The male connector includes a male terminal body with a male terminal joint, a freely rotating screw sleeve locked around the external periphery of the male terminal joint. The female connector includes a female terminal body with a female terminal joint, and an insert space formed in the female terminal joint for inserting the male terminal joint, and the screw sleeve is screwed and coupled to the female terminal joint. The fastener includes a pivot portion formed at an external side of the female connector, and a locking arm pivotally installed onto the pivot portion, extended towards the male terminal body, disposed across the screw sleeve, and locked to the male connector.
摘要:
An electronic vehicle license is installed on a vehicle to store a record and insurance data of the vehicle, and a reading and writing control device is provided for an authority/official organization to read and write data into the electronic vehicle license; the electronic vehicle license includes a storage unit, a non-contact transferring unit, and a central processing unit; the reading and writing control device includes a central controlling unit, which has a weight assigned thereto in accordance with a jurisdiction of the authority that is authorized to use the reading and writing control device so that the central controlling unit is allowed to handle certain categories of data; the reading and writing control device further includes an encrypting and decrypting unit, a non-contact transferring unit, and a displaying unit to show the data of the vehicle license.
摘要:
A method for making reverse osmosis permeate water and mineral water from deep seawater includes the steps of: a) sand-filtering or ultra-filtering the deep seawater; b) conducting a first nano-filtering step to nano-filter the deep seawater after the step a) to obtain first nano-filtration permeate water and first nano-filtration concentrated water; c) filtering the first nano-filtration permeate water using a reverse osmosis apparatus to obtain reverse osmosis permeate water and reverse osmosis concentrated water; and d) treating the first nano-filtration concentrated water by electrodialysis to obtain anion-rich water, cation-rich water, and mineral water.
摘要:
In the manufacture of a semiconductor, a DBARC layer is deposited upon a wafer to prevent reflection. A photo resist layer is deposited upon the DBARC layer and the wafer is selectively exposed to irradiation. The irradiation generates photo acid (H+ ions) in the exposed areas of the photo resist and DBARC. In order to provide better resolution in the DBARC for micro-features, an electric field is generated vertically through the coated wafer before or during post exposure baking (PEB) to create a uniform vertical distribution of H+ ions though the DBARC. The coated wafer is then developed to remove either the unexposed portions, or exposed portion of the DBARC. The cavities formed by the developer have side walls that are substantially vertical as a result of the uniform vertical distribution of the H+ ions.