Polarization Control Apparatus and Method
    4.
    发明申请
    Polarization Control Apparatus and Method 有权
    极化控制装置及方法

    公开(公告)号:US20090201483A1

    公开(公告)日:2009-08-13

    申请号:US12352326

    申请日:2009-01-12

    IPC分类号: G02B5/30 G03B27/72

    摘要: Apparatus and methods are used to control a polarization state of a radiation beam. A polarization control unit is configured to modulate a polarization state of at least a part of a radiation beam. A determination arrangement is configured to subsequently determine the polarization state of the at least a part of the radiation beam. A feedback unit is configured to provide signals to the polarization control arrangement based on at least the determined polarization state in order to correct for deviation in the polarization state of the part of the radiation beam from a desired polarization state. For example, the correction may ensure that the polarization state of the part of the radiation beam is at, or returns to, the desired polarization state.

    摘要翻译: 装置和方法用于控制辐射束的偏振状态。 偏振控制单元被配置为调制辐射束的至少一部分的偏振状态。 确定装置被配置为随后确定辐射束的至少一部分的偏振状态。 反馈单元被配置为基于至少所确定的偏振状态向偏振控制装置提供信号,以便校正辐射束的部分偏振状态与期望偏振状态的偏差。 例如,校正可以确保辐射束的一部分的偏振状态处于或返回到期望的偏振状态。