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10 条记录 (耗时 0.024 秒)

    Inner plate and crucible assembly for deposition having the same
    9.
    发明授权
    Inner plate and crucible assembly for deposition having the same 有权
    用于沉积的内板和坩埚组件具有相同的功能

    公开(公告)号：US08137470B2

    公开(公告)日：2012-03-20

    申请号：US12318408

    申请日：2008-12-29

    申请人： Kyung-Soo Min ,  Chang-Soon Ji

    发明人： Kyung-Soo Min ,  Chang-Soon Ji

    IPC分类号： C23C16/00 ,  B01D1/00 ,  B01D3/04 ,  C10G1/02 ,  C10G9/18

    CPC分类号： C23C14/243

    摘要： A crucible assembly for deposition and an inner plate used in the crucible assembly. The crucible assembly includes a main body having an inner space accommodating a deposition material and an opening arranged at an upper portion of the inner space, a cap having an aperture arranged at a top of the main body and combined with the main body and an inner plate arranged between the main body and the cap, the inner plate covering the opening of the main body, the crucible assembly including inner channels arranged to allow vapor of the deposition material from the inner space of the main body to be expelled to an outside of the aperture in the cap via a space arranged between an outer side surface of the inner plate and an inner side surface of the cap.

    摘要翻译： 用于沉积的坩埚组件和用于坩埚组件中的内板。 坩埚组件包括主体，其具有容纳沉积材料的内部空间和布置在内部空间的上部的开口，盖具有布置在主体的顶部并与主体组合的孔， 排列在主体和盖之间的板，内板覆盖主体的开口，坩埚组件包括内通道，其布置成允许沉积材料的蒸汽从主体的内部空间排出到 通过设置在内板的外侧表面和盖的内侧表面之间的空间来限制盖中的孔。

    Inner plate and crucible assembly for deposition having the same
    10.
    发明申请
    Inner plate and crucible assembly for deposition having the same 有权
    用于沉积的内板和坩埚组件具有相同的功能

    公开(公告)号：US20100043710A1

    公开(公告)日：2010-02-25

    申请号：US12318408

    申请日：2008-12-29

    申请人： Kyung-Soo Min ,  Chang-Soon Ji

    发明人： Kyung-Soo Min ,  Chang-Soon Ji

    IPC分类号： C23C16/54

    CPC分类号： C23C14/243

    摘要： A crucible assembly for deposition and an inner plate used in the crucible assembly. The crucible assembly includes a main body having an inner space accommodating a deposition material and an opening arranged at an upper portion of the inner space, a cap having an aperture arranged at a top of the main body and combined with the main body and an inner plate arranged between the main body and the cap, the inner plate covering the opening of the main body, the crucible assembly including inner channels arranged to allow vapor of the deposition material from the inner space of the main body to be expelled to an outside of the aperture in the cap via a space arranged between an outer side surface of the inner plate and an inner side surface of the cap.

    摘要翻译： 用于沉积的坩埚组件和用于坩埚组件中的内板。 坩埚组件包括主体，其具有容纳沉积材料的内部空间和布置在内部空间的上部的开口，盖具有布置在主体的顶部并与主体组合的孔， 排列在主体和盖之间的板，内板覆盖主体的开口，坩埚组件包括内通道，其布置成允许沉积材料的蒸汽从主体的内部空间排出到 通过设置在内板的外侧表面和盖的内侧表面之间的空间来限制盖中的孔。