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公开(公告)号：US20060076880A1
公开(公告)日：2006-04-13
申请号：US11200097
申请日：2005-08-10
申请人： Hyoung-bin Park , Young-dong Lee , Gi-young Kim , Seung-hyun Son , Young-mo Kim , Seong-eui Lee , Sang-hun Jang
发明人： Hyoung-bin Park , Young-dong Lee , Gi-young Kim , Seung-hyun Son , Young-mo Kim , Seong-eui Lee , Sang-hun Jang
CPC分类号： H01J61/305 , H01J61/06
摘要： Provided is a flat lamp that includes: an upper substrate and a lower substrate arranged to face each other and separated by a predetermined distance, with at least one discharge cell formed between the upper and lower substrates; and at least one pair of a first electrode portion and a second electrode portion formed on at least one of the upper and lower substrates, wherein one pair corresponds to one discharge cell, and the first electrode portion is composed of an electrode and the second electrode portion is composed of a plurality of electrodes.
摘要翻译： 本发明提供一种扁平灯，包括：上基板和下基板，被布置为彼此面对并分隔预定距离，至少一个放电单元形成在上基板和下基板之间; 以及形成在所述上基板和所述下基板中的至少一个上的至少一对第一电极部分和第二电极部分，其中一对对应于一个放电单元，并且所述第一电极部分由电极和所述第二电极 部分由多个电极组成。
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公开(公告)号：US20100026163A1
公开(公告)日：2010-02-04
申请号：US12585972
申请日：2009-09-30
IPC分类号： H01J63/04
摘要： A plasma-discharge light emitting device is provided. The plasma-discharge light emitting device may include: rear and front panels separated from each other in a predetermined interval, wherein at least one discharge cell may be provided between the rear and front panels, and wherein plasma discharge may be generated in the discharge cells; a pair of discharge electrodes provided on at least one of the rear and front panels for each of the discharge cells; a trench provided as a portion of each of the discharge cells between the pair of the discharge electrodes; and electron-emitting material layers provided on both sidewalls of the trench.
摘要翻译： 提供了一种等离子体放电发光器件。 等离子体放电发光器件可以包括：以预定间隔彼此分开的后面板和前面板，其中可以在后面板和前面板之间设置至少一个放电单元，并且其中可以在放电单元中产生等离子体放电 ; 一对放电电极，设置在每个放电单元的后面板和前面板中的至少一个上; 设置在所述一对放电电极之间的每个放电单元的一部分的沟槽; 以及设置在沟槽的两个侧壁上的电子发射材料层。
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公开(公告)号：US20060170344A1
公开(公告)日：2006-08-03
申请号：US11179727
申请日：2005-07-13
IPC分类号： H01J17/49
摘要： A plasma-discharge light emitting device is provided. The plasma-discharge light emitting device may include: rear and front panels separated from each other in a predetermined interval, wherein at least one discharge cell may be provided between the rear and front panels, and wherein plasma discharge may be generated in the discharge cells; a pair of discharge electrodes provided on at least one of the rear and front panels for each of the discharge cells; a trench provided as a portion of each of the discharge cells between the pair of the discharge electrodes; and electron-emitting material layers provided on both sidewalls of the trench.
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公开(公告)号：US07999474B2
公开(公告)日：2011-08-16
申请号：US12585972
申请日：2009-09-30
IPC分类号： H01J17/49
摘要： A plasma-discharge light emitting device is provided. The plasma-discharge light emitting device may include: rear and front panels separated from each other in a predetermined interval, wherein at least one discharge cell may be provided between the rear and front panels, and wherein plasma discharge may be generated in the discharge cells; a pair of discharge electrodes provided on at least one of the rear and front panels for each of the discharge cells; a trench provided as a portion of each of the discharge cells between the pair of the discharge electrodes; and electron-emitting material layers provided on both sidewalls of the trench.
摘要翻译： 提供了一种等离子体放电发光器件。 等离子体放电发光器件可以包括：以预定间隔彼此分开的后面板和前面板，其中可以在后面板和前面板之间设置至少一个放电单元，并且其中可以在放电单元中产生等离子体放电 ; 一对放电电极，设置在每个放电单元的后面板和前面板中的至少一个上; 设置在所述一对放电电极之间的每个放电单元的一部分的沟槽; 以及设置在沟槽的两个侧壁上的电子发射材料层。
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公开(公告)号：US07615928B2
公开(公告)日：2009-11-10
申请号：US11179727
申请日：2005-07-13
IPC分类号： H01J17/49
摘要： A plasma-discharge light emitting device is provided. The plasma-discharge light emitting device may include: rear and front panels separated from each other in a predetermined interval, wherein at least one discharge cell may be provided between the rear and front panels, and wherein plasma discharge may be generated in the discharge cells; a pair of discharge electrodes provided on at least one of the rear and front panels for each of the discharge cells; a trench provided as a portion of each of the discharge cells between the pair of the discharge electrodes; and electron-emitting material layers provided on both sidewalls of the trench.
摘要翻译： 提供了一种等离子体放电发光器件。 等离子体放电发光器件可以包括：以预定间隔彼此分开的后面板和前面板，其中可以在后面板和前面板之间设置至少一个放电单元，并且其中可以在放电单元中产生等离子体放电 ; 一对放电电极，设置在每个放电单元的后面板和前面板中的至少一个上; 设置在所述一对放电电极之间的每个放电单元的一部分的沟槽; 以及设置在沟槽的两个侧壁上的电子发射材料层。
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6.发明授权Microwave resonance plasma generating apparatus and plasma processing system having the same 有权微波共振等离子体发生装置及其等离子体处理系统公开(公告)号：US08039772B2
公开(公告)日：2011-10-18
申请号：US11492122
申请日：2006-07-25
申请人： Young-dong Lee , Igor Antonovich Kossyi , Mamikon Aramovich Misakyan , Merab Ivanovich Taktakishvili
发明人： Young-dong Lee , Igor Antonovich Kossyi , Mamikon Aramovich Misakyan , Merab Ivanovich Taktakishvili
IPC分类号： B23K10/00
CPC分类号： H01J37/32229 , H01J37/32192
摘要： A microwave resonance plasma generating apparatus, a plasma processing system having the same and a method of generating a microwave resonance plasma are provided. The apparatus includes a microwave generating unit which generates a microwave, and a plasma producing unit which produces electrons and photons of high energy using the microwave generated from the microwave generating unit. The plasma producing unit includes a coaxial waveguide having an inner electrode disposed adjacent to the microwave generating unit, an outer electrode connected to the microwave generating unit and disposed to coaxially surround a portion of the inner electrode, the outer electrode being shorter than the inner electrode, and a dielectric tube disposed between the inner electrode and the outer electrode to insulate between the inner electrode and the outer electrode. The coaxial waveguide utilizes a principle of “cut or truncated electrode of coaxial waveguide” and a resonance phenomenon of Langmiur.
摘要翻译： 提供微波共振等离子体生成装置，具有该等离子体处理系统的等离子体处理系统和产生微波共振等离子体的方法。 该装置包括产生微波的微波产生单元和使用从微波产生单元产生的微波产生高能量的电子和光子的等离子体产生单元。 等离子体生成单元包括具有与微波发生单元相邻设置的内部电极的同轴波导，外部电极，其与微波发生单元连接并且设置成同轴地围绕内部电极的一部分，外部电极比内部电极短 以及设置在内部电极和外部电极之间以在内部电极和外部电极之间绝缘的电介质管。 同轴波导采用“同轴波导的切割或截短电极”和Langmiur共振现象的原理。
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7.发明授权Inductively coupled plasma generating apparatus incorporating serpentine coil antenna 失效含有蛇形线圈天线的感应耦合等离子体发生装置公开(公告)号：US07381292B2
公开(公告)日：2008-06-03
申请号：US10684522
申请日：2003-10-15
IPC分类号： H01L21/306 , C23C16/00
CPC分类号： H01J37/321
摘要： An inductively coupled plasma (ICP) generating apparatus includes an evacuated reaction chamber, an antenna installed at an upper portion of the reaction chamber to induce an electric field for ionizing reaction gas supplied into the reaction chamber and generating plasma, and an radio frequency (RF) power source connected to the antenna to apply radio frequency power to the antenna, wherein the antenna has a plurality of coils having different radiuses, at least one of the coils being a serpentine coil bent in a zigzag pattern. Capacitors are connected between the RF power source and a matching network and between the matching network and the antenna, in parallel with the antenna, to induce a LC resonance phenomenon. With the ICP generating apparatus having the above structure, it is possible to reduce antenna inductance, suppress capacitive coupling, and improve plasma uniformity. It is also possible to discharge and sustain plasma efficiently using the LC resonance phenomenon.
摘要翻译： 电感耦合等离子体（ICP）发生装置包括抽真空反应室，安装在反应室上部的天线，以诱导供给反应室的反应气体的电离电离并产生等离子体，以及射频 ）电源连接到所述天线以对所述天线施加射频功率，其中所述天线具有多个具有不同半径的线圈，所述线圈中的至少一个是以锯齿形图案弯曲的蛇形线圈。 电容器连接在RF电源和匹配网络之间，并且与天线并联的匹配网络和天线之间，以引起LC共振现象。 利用具有上述结构的ICP发生装置，可以减少天线电感，抑制电容耦合并提高等离子体均匀性。 也可以使用LC共振现象有效地放电和维持等离子体。
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