公开(公告)号：US07065898B2

公开(公告)日：2006-06-27

申请号：US10763203

申请日：2004-01-26

申请人： Hyun-Joon Kim ,  Yo-Han Ahn ,  Dong-Seok Ham ,  Jae-Bong Kim

发明人： Hyun-Joon Kim ,  Yo-Han Ahn ,  Dong-Seok Ham ,  Jae-Bong Kim

IPC分类号： F26B21/06

CPC分类号： H01L21/67017 ,  H01L21/67772

摘要： A module for transferring a substrate includes a load port for supporting a container to receive a plurality of substrates, a substrate transfer chamber disposed between the load port and a substrate process module, a substrate transfer robot disposed in the substrate transfer chamber for transferring the substrates between the container and the substrate process module, a gas supply unit connected to the substrate transfer chamber for supplying a purge gas into the substrate transfer chamber to purge an interior of the substrate transfer chamber, and a contamination control unit connected to the substrate transfer chamber for circulating the purge gas supplied into the substrate transfer chamber, resupplying the circulated purge gas into the substrate transfer chamber and removing particles and airborne molecular contaminants from the purge gas being circulated. Contamination of a substrate may be prevented and a necessary amount of purge gas may be reduced.

摘要翻译： 用于转印衬底的模块包括用于支撑容器以容纳多个衬底的负载端口，设置在负载端口和衬底处理模块之间的衬底传送室，设置在衬底传送室中用于传送衬底的衬底传送机器人 在所述容器和所述基板处理模块之间，连接到所述基板传送室的气体供应单元，用于将净化气体供应到所述基板传送室中以净化所述基板传送室的内部;以及污染控制单元，连接到所述基板传送室 用于循环供给到基板传送室中的吹扫气体，将循环的净化气体再供给到基板传送室中，并从正在循环的吹扫气体中除去颗粒和空气传播的分子污染物。 可以防止基材的污染，并且可以减少必需量的吹扫气体。

公开(公告)号：US20060225299A1

公开(公告)日：2006-10-12

申请号：US11451315

申请日：2006-06-13

申请人： Hyun-Joo Kim ,  Yo-Han Ahn ,  Dong-Seok Ham ,  Jae-Bong Kim

发明人： Hyun-Joo Kim ,  Yo-Han Ahn ,  Dong-Seok Ham ,  Jae-Bong Kim

IPC分类号： F26B21/06

CPC分类号： H01L21/67017 ,  H01L21/67772

摘要： A method of controlling contamination in a substrate transfer chamber that is disposed between a load port for supporting a container to receive a plurality of substrates and a substrate process module for processing the substrates includes supplying a purge gas into the substrate transfer chamber to purge an interior of the substrate transfer chamber, circulating the purge gas supplied into the substrate transfer chamber through a gas circular pipe, removing particles and airborne molecular contaminants from the purge gas being circulated, and resupplying the circulated purge gas into the substrate transfer chamber.

摘要翻译： 一种控制衬底传送室中的污染物的方法，该衬底传送室设置在用于支撑容器以容纳多个衬底的负载端口和用于处理衬底的衬底处理模块之间，包括将清洗气体供应到衬底传送室中以净化内部 的衬底传送室，通过气体环形管循环供给到衬底传送室的吹扫气体，从循环的吹扫气体中除去颗粒和空气传播的分子污染物，并将循环的净化气体再供给到衬底传送室中。

公开(公告)号：US6133855A

公开(公告)日：2000-10-17

申请号：US469545

申请日：1999-12-22

申请人： Jae-Bong Kim

发明人： Jae-Bong Kim

IPC分类号： G08G1/09 ,  B60Q1/48 ,  B60R99/00

CPC分类号： B60Q9/002

摘要： An apparatus and method for warning illegal stopping and parking car, wherein a controller compares a position information of a vehicle provided by a GSP receiver with a position information of banned area stored in a data storage to discriminate whether the vehicle is parked or stopped according to an engine revolution and a vehicle speed detected while the vehicle is within the premise of the banned area, and to raise a warning when the vehicle is parked or stopped as a result of the discrimination, thereby assisting a driver in preventing an illegal parking or stopping in the banned area by mistake or on purpose.

摘要翻译： 一种用于警告非法停车和停车的装置和方法，其中控制器将由GSP接收机提供的车辆的位置信息与存储在数据存储器中的禁止区域的位置信息进行比较，以根据 在车辆处于被禁区域的前提下，检测到发动机转速和车速，并且在车辆由于歧视而停车或停车时发出警告，从而辅助驾驶员防止非法停车或停车 在被禁止的地区由于错误或故意。

公开(公告)号：US20060003684A1

公开(公告)日：2006-01-05

申请号：US11143589

申请日：2005-06-03

申请人： Jung-Sung Hwang ,  Chang-Min Cho ,  Jae-Hyun Yang ,  Sang-Mun Chon ,  Jae-Bong Kim

发明人： Jung-Sung Hwang ,  Chang-Min Cho ,  Jae-Hyun Yang ,  Sang-Mun Chon ,  Jae-Bong Kim

IPC分类号： F24F7/007

CPC分类号： F24F13/068 ,  F24F3/161

摘要： Grating forming the floor of a clean room minimizes turbulence and enhances the rate at which air is discharged therethrough. The grate includes a base plate having a plurality of through-holes. Each of the through-holes includes a receiving portion through which the air is received and an exhausting portion through which the air is exhausted. The cross-sectional area of the receiving decreases toward the exhausting portion, and the cross-sectional area of the exhausting portion decreases toward the receiving portion.

摘要翻译： 形成洁净室的地板的光栅使湍流最小化，并提高空气通过其排出的速率。 格栅包括具有多个通孔的基板。 每个通孔包括容纳空气的容纳部分和空气排出的排气部分。 接收部的截面积朝向排气部减小，排气部的截面积朝向接收部减小。