Powder-Surface Treatment Apparatus
    4.
    发明公开

    公开(公告)号:US20240018649A1

    公开(公告)日:2024-01-18

    申请号:US18148331

    申请日:2022-12-29

    IPC分类号: C23C16/44 C23C16/455

    CPC分类号: C23C16/4417 C23C16/45544

    摘要: An embodiment powder-surface treatment apparatus includes a housing defining an internal space, a main chamber installed in the internal space and defining an accommodation space in which a surface treatment process is performable using ALD, an injection unit provided on a first end portion of the main chamber, a plurality of sub-chambers arranged in a stack on top of each other in a multi-step configuration along the accommodation space in the main chamber in a state where an internal space in each of the plurality of sub-chambers is filled with a powder, a discharging unit provided on a second end portion of the main chamber, a loading apparatus configured to load a new sub-chamber into the accommodation space in the main chamber, and an unloading apparatus configured to unload and discharge at least one of the plurality of sub-chambers from the accommodation space to the outside.

    FRICTION COEFFICIENT MEASURING METHOD OF SURFACE OF SPECIMEN
    9.
    发明申请
    FRICTION COEFFICIENT MEASURING METHOD OF SURFACE OF SPECIMEN 审中-公开
    样品表面摩擦系数测量方法

    公开(公告)号:US20160161396A1

    公开(公告)日:2016-06-09

    申请号:US14944276

    申请日:2015-11-18

    IPC分类号: G01N19/02 G01Q60/24

    CPC分类号: G01N19/02 G01Q30/06 G01Q60/26

    摘要: A method of measuring a friction coefficient of a surface of a specimen includes: obtaining surface information of the specimen by using an atomic force microscope (AFM); calculating data of a friction coefficient of the surface of the specimen by using the surface information of the specimen; and mapping the data of the friction coefficient of the specimen to an image. The method of measuring a friction coefficient of a surface of a specimen may prevent a probe part of an atomic force microscope from being worn out and secure high reliability of the friction coefficient value by correcting the atomic force microscope using a specimen to be actually measured and measuring a fiction coefficient at the same time.

    摘要翻译: 测定试样表面的摩擦系数的方法包括:使用原子力显微镜(AFM)获得试样的表面信息; 通过使用试样的表面信息计算试样表面的摩擦系数的数据; 并将样本的摩擦系数的数据映射到图像。 测定试样表面的摩擦系数的方法可以防止原子力显微镜的探头部分磨损,并且通过使用要实际测量的试样校正原子力显微镜来确保摩擦系数值的高可靠性, 同时测量小说系数。