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公开(公告)号:US20090033916A1
公开(公告)日:2009-02-05
申请号:US11833440
申请日:2007-08-03
申请人: I-Jen Hsu , Cheng-Chung Lai
发明人: I-Jen Hsu , Cheng-Chung Lai
CPC分类号: G01B9/02027 , G01B9/02007 , G01B2290/40 , G01B2290/45 , G01B2290/70
摘要: A system and method for measuring interferences are disclosed. The system is based on the concept of a composite interferometer. The sample is measured while a simultaneous compensation of the phase deviation due to the relative displacement of the optical delay component between the measurements at different pixels of the sample is performed. In the application of profilometry, the information of the surface profile of a material is obtained from the phase shift of the interference signal. By using the proposed compensation mechanism, an axial resolution at nanometer scale can be achieved. For the measurement of a thin film, a polarized probe beam is oblique incident on the sample. The system can perform a simultaneous measurement of the refractive index and the thickness of the thin film. From the ratio of the intensities of the interferograms of TE and TM waves as well as the phase shifts of the interferograms, the refractive index and the thickness of the thin film can then be obtained simultaneously.
摘要翻译: 公开了一种用于测量干扰的系统和方法。 该系统是基于复合干涉仪的概念。 测量样本,同时补偿由于样品的不同像素处的测量之间的光学延迟分量的相对位移引起的相位偏差。 在轮廓测量的应用中,从干涉信号的相移中获得材料的表面轮廓的信息。 通过使用提出的补偿机制,可以实现纳米尺度的轴向分辨率。 对于薄膜的测量,偏振探测光束倾斜入射到样品上。 该系统可以同时测量薄膜的折射率和厚度。 从TE和TM波的干涉图的强度比以及干涉图的相移的比例可以同时获得薄膜的折射率和厚度。
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公开(公告)号:US20080304125A1
公开(公告)日:2008-12-11
申请号:US11758032
申请日:2007-06-05
申请人: I-Jen Hsu , Chia-Yun Kao , Cheng-Chung Lai , Chao-Ming Chang , Ti-Kuang Hou
发明人: I-Jen Hsu , Chia-Yun Kao , Cheng-Chung Lai , Chao-Ming Chang , Ti-Kuang Hou
CPC分类号: G02B17/004 , G02B17/0856 , G02B26/06 , Y10S359/90
摘要: This invention provides a system and a method of the optical delay line, wherein the system comprises a source and an array of mirrors, wherein the array of mirrors comprises a first reflective mirror, a second reflective mirror, a third reflective mirror, and a fourth reflective mirror. Beams from the source could be delayed because the beams are multi-reflected by the reflective mirrors.
摘要翻译: 本发明提供了一种光学延迟线的系统和方法,其中该系统包括源和反射镜阵列,其中反射镜阵列包括第一反射镜,第二反射镜,第三反射镜和第四反射镜 反光镜。 来自光源的光束可能被延迟,因为光束被反射镜多重反射。
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公开(公告)号:US07920269B2
公开(公告)日:2011-04-05
申请号:US11833440
申请日:2007-08-03
申请人: I-Jen Hsu , Cheng-Chung Lai
发明人: I-Jen Hsu , Cheng-Chung Lai
CPC分类号: G01B9/02027 , G01B9/02007 , G01B2290/40 , G01B2290/45 , G01B2290/70
摘要: A system and method for measuring interferences are disclosed. The system is based on the concept of a composite interferometer. The sample is measured while a simultaneous compensation of the phase deviation due to the relative displacement of the optical delay component between the measurements at different pixels of the sample is performed. In the application of profilometry, the information of the surface profile of a material is obtained from the phase shift of the interference signal. By using the proposed compensation mechanism, an axial resolution at nanometer scale can be achieved. For the measurement of a thin film, a polarized probe beam is oblique incident on the sample. The system can perform a simultaneous measurement of the refractive index and the thickness of the thin film. From the ratio of the intensities of the interferograms of TE and TM waves as well as the phase shifts of the interferograms, the refractive index and the thickness of the thin film can then be obtained simultaneously.
摘要翻译: 公开了一种用于测量干扰的系统和方法。 该系统是基于复合干涉仪的概念。 测量样本,同时补偿由于样品的不同像素处的测量之间的光学延迟分量的相对位移引起的相位偏差。 在轮廓测量的应用中,从干涉信号的相移中获得材料的表面轮廓的信息。 通过使用提出的补偿机制,可以实现纳米级的轴向分辨率。 对于薄膜的测量,偏振探测光束倾斜入射到样品上。 该系统可以同时测量薄膜的折射率和厚度。 从TE和TM波的干涉图的强度比以及干涉图的相移的比例可以同时获得薄膜的折射率和厚度。
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公开(公告)号:US07576933B2
公开(公告)日:2009-08-18
申请号:US11758032
申请日:2007-06-05
申请人: I-Jen Hsu , Chia-Yun Kao , Cheng-Chung Lai , Chao-Ming Chang , Ti-Kuang Hou
发明人: I-Jen Hsu , Chia-Yun Kao , Cheng-Chung Lai , Chao-Ming Chang , Ti-Kuang Hou
CPC分类号: G02B17/004 , G02B17/0856 , G02B26/06 , Y10S359/90
摘要: This invention provides a system and a method of the optical delay line, wherein the system comprises a source and an array of mirrors, wherein the array of mirrors comprises a first reflective mirror, a second reflective mirror, a third reflective mirror, and a fourth reflective mirror. Beams from the source could be delayed because the beams are multi-reflected by the reflective mirrors.
摘要翻译: 本发明提供了一种光学延迟线的系统和方法,其中该系统包括源和反射镜阵列,其中反射镜阵列包括第一反射镜,第二反射镜,第三反射镜和第四反射镜 反光镜。 来自光源的光束可能被延迟,因为光束被反射镜多重反射。
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公开(公告)号:US08596558B2
公开(公告)日:2013-12-03
申请号:US13067991
申请日:2011-07-14
申请人: Cheng-Chung Lai
发明人: Cheng-Chung Lai
CPC分类号: B05B1/3026 , B05B9/01
摘要: A finger-operated switch is revealed. The finger-operated switch includes a main body and a switch. The main body includes an intake channel, a turning channel and an outlet channel connected sequentially. On end of the outlet channel near the turning channel is arranged with an outlet and mounted with a waterproof gasket. The switch including a rotating shaft and a waterproof spacer is set on the rotating shaft. There is a certain distance between the turning channel and the rotating shaft mounted therein. The waterproof spacer is floatable in and moving synchronously with the rotating shaft. While adjusting the rotating shaft, the waterproof spacer is driven to close or open the outlet of the waterproof gasket. When the outlet is closed, a pushing force is produced toward the outlet because water pressure in the turning channel presses the waterproof spacer. A watertight effect is achieved.
摘要翻译: 手指开关显示。 手指开关包括主体和开关。 主体包括连续连接的进气通道,转向通道和出口通道。 在转向通道附近的出口通道的末端设有出口,并安装防水垫圈。 包括旋转轴和防水间隔件的开关设置在旋转轴上。 转向通道与安装在其中的旋转轴之间有一定距离。 防水间隔件可旋转并与旋转轴同步移动。 在调节旋转轴的同时,驱动防水间隔件关闭或打开防水垫圈的出口。 当出口关闭时,由于转向通道中的水压力按压防水间隔件,朝向出口产生推力。 实现了防水效果。
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公开(公告)号:US20130015270A1
公开(公告)日:2013-01-17
申请号:US13067991
申请日:2011-07-14
申请人: Cheng-Chung Lai
发明人: Cheng-Chung Lai
IPC分类号: B05B9/01
CPC分类号: B05B1/3026 , B05B9/01
摘要: A finger-operated switch is revealed. The finger-operated switch includes a main body and a switch. The main body includes an intake channel, a turning channel and an outlet channel connected sequentially. On end of the outlet channel near the turning channel is arranged with an outlet and mounted with a waterproof gasket. The switch including a rotating shaft and a waterproof spacer is set on the rotating shaft. There is a certain distance between the turning channel and the rotating shaft mounted therein. The waterproof spacer is floatable in and moving synchronously with the rotating shaft. While adjusting the rotating shaft, the waterproof spacer is driven to close or open the outlet of the waterproof gasket. When the outlet is closed, a pushing force is produced toward the outlet because water pressure in the turning channel presses the waterproof spacer. A watertight effect is achieved.
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