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公开(公告)号：US3584933A
公开(公告)日：1971-06-15
申请号：US3584933D
申请日：1969-04-07
Applicant: IBM
Inventor： HABEGGER MILLARD A , LIPP JAMES
CPC classification number: G02F1/31
Abstract: Light deflection apparatus for selectively deflecting a beam of light from a source to any one of a plurality of discrete positions on a target is provided. Operative under electro-optic control, the apparatus is of the external reflecting type. A light beam propagated as a set of extraordinary rays never enters the light deflecting birefringent element but is reflected on incidence at it. Astigmatic aberrations in the possible output beams are avoided, pathlength compensation between the two possible output beams of a deflecting stage is achieved, and a diffraction limited spot of light is provided as the output beam.
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Patent Agency Ranking2.发明授权Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer 失效用于检测目标上的注册标记的方法和装置作为半导体波形
公开(公告)号：US3901814A
公开(公告)日：1975-08-26
申请号：US48350974
申请日：1974-06-27
Applicant: IBM
Inventor： DAVIS DONALD E , HABEGGER MILLARD A , MOORE RICHARD D , WEBER EDWARD V , WOODARD OLLIE C
IPC: G05D3/12 , H01J37/304 , H01L21/027 , H01J37/00
CPC classification number: H01J37/304
Abstract: A square-shaped beam of charged particles is passed over a registration mark, which is formed by a depression or a rise in the surface of a semiconductor wafer. When the beam passes over one edge of the mark, a positive peak signal is produced from a pair of diode detectors located with their surfaces orthogonal to the direction of the beam scan and a negative peak signal is produced when the beam passes over the other edge of the mark. The amplitudes of these peak signals are balanced so that they are substantially the same irrespective of the location of each of the diode detectors relative to the mark in comparison with the location of the other of the diode detectors relative to the mark. These peak signals are compared with positive and negative threshold signals in comparators with an output signal being produced from each of the comparators when its threshold signal is crossed. This enables location of each of the marks to be determined. The positive and negative threshold signals are set during the prior scan with the scans being in opposite directions. The peak to peak amplitude across the registration mark in a particular area is sampled during the first scan and used to provide an automatic gain factor for the remainder of the scans across the mark so that a substantially constant peak amplitude signal is transmitted to the comparators.
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公开(公告)号：US3612652A
公开(公告)日：1971-10-12
申请号：US3612652D
申请日：1969-11-05
Applicant: IBM
Inventor： HABEGGER MILLARD A
CPC classification number: G02B27/283 , G02F1/00 , G02F1/31 , G02F1/37
Abstract: An optical device having the property that if a light beam is propagated at it in one direction the light beam is totally reflected and if the light beam is propagated at it in the reverse direction it is totally transmitted. A birefringent device has its optical axis in a predetermined direction with respect to the location of incidence of a light beam on it. The birefringent device is disposed in a suitable medium having an index of refraction which is substantially the same as the higher index of refraction of the birefringent device. When the light beam is propagated at a predetermined angle with respect to the birefringent device the nonreciprocal operation of the device occurs.
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公开(公告)号：US3632187A
公开(公告)日：1972-01-04
申请号：US3632187D
申请日：1969-11-05
Applicant: IBM
Inventor： HABEGGER MILLARD A
CPC classification number: G02F1/00 , G02B27/283 , G02F1/31 , G02F1/37
Abstract: Light deflection and scanning apparatus employing a nonreciprocal optical device as a part of an optical circulator. The device has the property that if light is projected to it in one direction it is totally reflected and if it is projected in a second direction it is totally transmitted. By employing this device, optical energy may be coupled into and out of the circulator. The circulator is adjusted so that the optical energy follows a slightly off axis path with each revolution. Electrooptic means of a segmented type are provided in the path of the light in the circulator. The segments are individually controllable for selecting the location of exiting of the light from the circulator.
Abstract translation: 使用不可逆光学装置作为光循环器的一部分的光偏转和扫描装置。 该装置具有如下特征：如果在一个方向上将光投影到其上，则其被全反射，并且如果其沿第二方向投射，则其被完全透射。 通过使用该装置，光能可以耦合到循环器中和从循环器耦合。 循环器被调节，使得每次旋转时光能跟随稍微偏离的轴路径。 在循环器中的光的路径中设置有分段型的电光装置。 这些段可独立控制，用于选择来自循环器的光的离开位置。
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公开(公告)号：US3625590A
公开(公告)日：1971-12-07
申请号：US3625590D
申请日：1969-11-05
Applicant: IBM
Inventor： HABEGGER MILLARD A
CPC classification number: G02F1/31 , G02B27/283 , G02F1/00 , G02F1/37
Abstract: Optical circulator or storage ring apparatus employing a nonreciprocal optical device and reflecting means to store optical energy. The device has the property that if a light beam is projected to it in one direction it is totally reflected and if projected to it in a second direction it is totally transmitted. By employing this device, optical energy may be coupled into and out of the circulator without optical loss. By exercising control over the polarization of the energy the circulator converts it so that it may be supplied in either continuous wave or pulse form. If a nonlinear crystal is located in the circulator in the path of the energy the apparatus acts to convert from a fundamental wavelength to a predetermined harmonic of that wavelength.
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公开(公告)号：US3533104A
公开(公告)日：1970-10-06
申请号：US3533104D
申请日：1968-05-17
Applicant: IBM
Inventor： HABEGGER MILLARD A , HARRIS THOMAS J , SINCERBOX GLENN T
CPC classification number: G02B27/0149 , G01S1/02 , G02B27/01 , G02B27/0103 , G02B2027/0109 , G02B2027/0138 , G02B2027/014 , G02B2027/0145 , G02B2027/0154
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