公开(公告)号：US20240288765A1

公开(公告)日：2024-08-29

申请号：US18444438

申请日：2024-02-16

Applicant: ILLUMINA, INC.

Inventor： Ravi Billa ,  Tara Bozorg-Grayeli ,  Arvin Emadi ,  Cassandra Renee Greene Chamoun ,  Vanessa Montano-Machado ,  Roger Park

IPC: G03F7/00 ,  C23C14/18 ,  C23C14/24 ,  C23C14/58 ,  G03F7/30

CPC classification number: G03F7/0035 ,  C23C14/185 ,  C23C14/24 ,  C23C14/5873 ,  G03F7/0002 ,  G03F7/30

Abstract: In an example of a method for making a flow cell, a sacrificial layer is deposited over a substrate including depressions separated by interstitial regions. The sacrificial layer is dry etched from the depressions, and the sacrificial layer remains on the interstitial regions. A functionalized layer is deposited over the depressions and over the sacrificial layer. The sacrificial layer is removed from the interstitial regions, which also removes the functionalized layer that overlies the interstitial regions.