公开(公告)号：US20230333017A1

公开(公告)日：2023-10-19

申请号：US18297891

申请日：2023-04-10

Applicant: ILLUMINA, INC.

Inventor： Tara BOZORG-GRAYELI ,  Ravi BILLA ,  Tracy FUNG ,  Mohsen REZAEI ,  Craig Hetherington ,  Paul Sangiorgio ,  Craig Ciesia ,  Arvin Emadi

IPC: G01N21/64 ,  H01L27/146

CPC classification number: G01N21/6428 ,  H01L27/14623 ,  G01N21/6454 ,  H01L27/14689

Abstract: Provided herein are various examples of aspects of a biosensor and methods for manufacturing and using aspects of a biosensor. The method of manufacturing may include forming a germanium layer above a surface of an image sensor and forming a dielectric stack above a surface of the germanium layer. The biosensor can be utilized by placing nucleic acid(s) in reaction sites of the biosensor, exposing the reaction sites to light from a light source (e.g., excitation light), receiving emitted light from the reaction sites via the germanium layer, and identifying, based on the emitted light, a composition of the one or more nucleic acids.