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公开(公告)号：US20210116476A1
公开(公告)日：2021-04-22
申请号：US17069228
申请日：2020-10-13
Applicant: IMEC VZW
Inventor： Thomas Hantschel , Hugo Bender , Kristof Paredis , Antti Kanniainen
Abstract: The disclosure is related to a method for performing SPM measurements, wherein a sample is attached to a cantilever and scanned across a tip. The tip is one of several tips present on a substrate comprising at least two different types of tips on its surface, thereby enabling performance of multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types. The disclosure is equally related to a substrate comprising a plurality of tips suitable for use in the method of the disclosure.
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公开(公告)号：US11112427B2
公开(公告)日：2021-09-07
申请号：US17069228
申请日：2020-10-13
Applicant: IMEC VZW
Inventor： Thomas Hantschel , Hugo Bender , Kristof Paredis , Antti Kanniainen
Abstract: The disclosure is related to a method for performing SPM measurements, wherein a sample is attached to a cantilever and scanned across a tip. The tip is one of several tips present on a substrate comprising at least two different types of tips on its surface, thereby enabling performance of multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types. The disclosure is equally related to a substrate comprising a plurality of tips suitable for use in the method of the disclosure.
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