公开(公告)号：US20210198154A1

公开(公告)日：2021-07-01

申请号：US17133270

申请日：2020-12-23

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Kuo-Chuang CHIU ,  Tzu-Yu LIU ,  Tien-Heng HUANG ,  Tzu-Chi CHOU ,  Cheng-Ting LIN

IPC: C04B35/64 ,  C04B35/14 ,  C04B35/628

Abstract: A method of forming low-k material is provided. The method includes providing a plurality of core-shell particles. The core of the core-shell particles has a first ceramic with a low melting point. The shell of the core-shell particles has a second ceramic with a low melting point and a low dielectric constant. The core-shell particles are sintered and molded to form a low-k material. The shell of the core-shell particles is connected to form a network structure of a microcrystal phase.