公开(公告)号：US20150065642A1

公开(公告)日：2015-03-05

申请号：US14070777

申请日：2013-11-04

Applicant: Industrial Technology Research Institute

Inventor： Lik-Hang CHAU ,  Chih-Hao LIANG ,  Hsi-Hsin SHIH ,  Chih-Chao YANG ,  Yi-Tsung PAN

IPC: C08K3/36 ,  C23C14/34 ,  C08K3/22

CPC classification number: C23C14/3464 ,  C08J7/06 ,  C08J2367/02 ,  C23C14/06

Abstract: Disclosed is a method of manufacturing an organic-inorganic composite film. The method includes co-sputtering an inorganic target and a fluorine-containing organic polymer target, thereby simultaneously depositing atoms from the inorganic target and atoms from the fluorine-containing organic polymer target on a substrate. As such, an organic-inorganic composite film is obtained. The organic-inorganic composite film includes a homogeneous, amorphous, and nonporous material composed of carbon, fluorine, oxygen and/or nitrogen, and M. M can be silicon, titanium, aluminum, chromium, or combinations thereof.

Abstract translation: 公开了一种制造有机 - 无机复合膜的方法。 该方法包括共溅射无机靶和含氟有机聚合物靶，从而同时将来自无机靶的原子和来自含氟有机聚合物靶的原子沉积在基底上。 因此，得到有机 - 无机复合膜。 有机 - 无机复合膜包括由碳，氟，氧和/或氮组成的均匀，无定形和无孔材料，M可以是硅，钛，铝，铬或其组合。

公开(公告)号：US20150126681A1

公开(公告)日：2015-05-07

申请号：US14590633

申请日：2015-01-06

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Lik-Hang CHAU ,  Chih-Hao LIANG ,  Hsi-Hsin SHIH ,  Chih-Chao YANG ,  Yi-Tsung PAN

IPC: C09D127/16 ,  C23C14/34 ,  C09D127/18

CPC classification number: C23C14/3464 ,  C08J7/06 ,  C23C14/06

Abstract: A method of manufacturing an organic-inorganic composite film is provided. The method includes co-sputtering an inorganic target and a fluorine-containing organic polymer target, thereby simultaneously depositing atoms from the inorganic target and atoms from the fluorine-containing organic polymer target on a substrate. As such, an organic-inorganic composite film is obtained. The organic-inorganic composite film includes a homogeneous, amorphous, and nonporous material composed of carbon, fluorine and/or chlorine, oxygen and/or nitrogen, and inorganic element M. The inorganic element M forms chemical bondings with carbon, fluorine, chlorine, oxygen and/or nitrogen, and wherein the bond length forms therefore is less than 2.78 Å.

Abstract translation: 提供了制造有机 - 无机复合膜的方法。 该方法包括共溅射无机靶和含氟有机聚合物靶，从而同时将来自无机靶的原子和来自含氟有机聚合物靶的原子沉积在基底上。 因此，得到有机 - 无机复合膜。 有机 - 无机复合膜包括由碳，氟和/或氯，氧和/或氮和无机元素M组成的均匀，无定形和无孔材料。无机元素M与碳，氟，氯， 氧和/或氮，并且其中所述键长度因此小于2.78。