公开(公告)号：US20150077751A1

公开(公告)日：2015-03-19

申请号：US14144284

申请日：2013-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yi-Chen HSIEH ,  Fu-Cheng YANG ,  Chih-Jung CHIANG

IPC: G01N21/21

CPC classification number: G01N21/8422 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214

Abstract: An optical inspection system suitable for inspecting a thin film is provided, in which a computer controls a controller to rotate angles of at least two of a polarization device, a phase compensation device and an analyzer at various incident wavelengths and incident angles of a light source, such that the intensities of a first image corresponding to the incident wavelengths and the incident angles of the light source are zero. The computer further records the rotated angles of at least two of the polarization device, the phase compensation device and the analyzer and intensities of a second image corresponding to the incident wavelengths and the incident angles when the intensities of the first image are zero, thereby obtaining a profiling diagram and a maximum intensity of the second images, in which the maximum intensity corresponds to a maximum grey level.

Abstract translation: 提供了一种适用于检查薄膜的光学检查系统，其中计算机控制控制器以偏振装置，相位补偿装置和分析器中的至少两个角度旋转光源的各种入射波长和入射角 使得对应于光源的入射波长和入射角的第一图像的强度为零。 当第一图像的强度为零时，计算机还记录至少两个偏振装置，相位补偿装置和分析器的旋转角度和对应于入射波长和入射角度的第二图像的强度，从而获得 第二图像的分析图和最大强度，其中最大强度对应于最大灰度级。