公开(公告)号：US20170045355A1

公开(公告)日：2017-02-16

申请号：US14974892

申请日：2015-12-18

Applicant: Industrial Technology Research Institute

Inventor： Yi-Chen HSIEH ,  Chia-Liang YEH ,  Chia-Hung CHO ,  Yi-Chang CHEN ,  Yi-Sha KU ,  Chun-Wei LO

IPC: G01B11/24

CPC classification number: G01B11/24 ,  G01B2210/56 ,  H01L22/12

Abstract: A scattering measurement system is provided, including: a light source generator for generating a detection light beam with multi-wavelengths, wherein the detection light beam is incident on an object so as to generate a plurality of multi-order diffraction light beams with three-dimensional feature information; a spatial filter for filtering out zero-order light beams from the plurality of multi-order diffraction light beams; and a detector having a photosensitive array for receiving the plurality of multi-order diffraction light beams filtered out by the spatial filter and converting the filtered plurality of multi-order diffraction light beams into multi-order diffraction signals with the three-dimensional feature information. As such, the three-dimensional structure of the object can be obtained by comparing the multi-order diffraction signals with a database.

Abstract translation: 提供了一种散射测量系统，包括：用于产生具有多波长的检测光束的光源发生器，其中检测光束入射到物体上，以便产生多个三阶衍射光束， 三维特征信息; 用于滤除来自所述多个多级衍射光束的零级光束的空间滤波器; 以及检测器，其具有用于接收由空间滤波器滤除的多个多级衍射光束的光敏阵列，并将经滤波的多个多阶衍射光束转换成具有三维特征信息的多阶衍射信号。 因此，可以通过将多阶衍射信号与数据库进行比较来获得对象的三维结构。

公开(公告)号：US20150077751A1

公开(公告)日：2015-03-19

申请号：US14144284

申请日：2013-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yi-Chen HSIEH ,  Fu-Cheng YANG ,  Chih-Jung CHIANG

IPC: G01N21/21

CPC classification number: G01N21/8422 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214

Abstract: An optical inspection system suitable for inspecting a thin film is provided, in which a computer controls a controller to rotate angles of at least two of a polarization device, a phase compensation device and an analyzer at various incident wavelengths and incident angles of a light source, such that the intensities of a first image corresponding to the incident wavelengths and the incident angles of the light source are zero. The computer further records the rotated angles of at least two of the polarization device, the phase compensation device and the analyzer and intensities of a second image corresponding to the incident wavelengths and the incident angles when the intensities of the first image are zero, thereby obtaining a profiling diagram and a maximum intensity of the second images, in which the maximum intensity corresponds to a maximum grey level.

Abstract translation: 提供了一种适用于检查薄膜的光学检查系统，其中计算机控制控制器以偏振装置，相位补偿装置和分析器中的至少两个角度旋转光源的各种入射波长和入射角 使得对应于光源的入射波长和入射角的第一图像的强度为零。 当第一图像的强度为零时，计算机还记录至少两个偏振装置，相位补偿装置和分析器的旋转角度和对应于入射波长和入射角度的第二图像的强度，从而获得 第二图像的分析图和最大强度，其中最大强度对应于最大灰度级。