公开(公告)号：US20150325437A1

公开(公告)日：2015-11-12

申请号：US14801547

申请日：2015-07-16

申请人： Institute of Microelectronics, Chinese Academy of Sciences

发明人： Dongmei LI ,  Xin CHEN ,  Shengfa LIANG ,  Shuang ZHAN ,  Peiwen ZHANG ,  Changqing XIE ,  Ming LIU

IPC分类号： H01L21/02 ,  H01L21/388

CPC分类号： H01L21/02554 ,  C23C8/10 ,  C23C12/00 ,  H01L21/02381 ,  H01L21/0242 ,  H01L21/02581 ,  H01L21/02614 ,  H01L21/02617 ,  H01L21/388

摘要： The present disclosure provides a method for preparing compound semiconductor sensitive film based on a displacement reaction-thermal oxidation method, the method comprising: growing a layer of Zn on a high temperature-resistant substrate; submerging the substrate on which the layer of Zn has been grown into ionic solution of soluble salt of Cu, such that Cu ions in the solution are displaced so as to separate Cu nano-particles out on a surface of the layer of Zn; and performing a thermal oxidation process on the layer of Zn to whose surface Cu nano-particles are adhered, such that the Cu nano-particles are oxidized into CuO nano-particles, so as to obtain a ZnO gas sensitive film that is doped with CuO nano-particles. The above preparing method has the following advantages: good filming quality, simplified preparation process, low cost and easy to control.

摘要翻译： 本发明提供一种基于置换反应 - 热氧化法制备化合物半导体敏感膜的方法，所述方法包括：在耐高温基材上生长Zn层; 将已经生长了Zn层的衬底浸没在Cu的可溶性盐的离子溶液中，使得溶液中的Cu离子移位，以便在Zn层的表面上分离Cu纳米颗粒; 并对其表面附着有Cu纳米粒子的Zn层进行热氧化处理，使Cu纳米粒子被氧化为CuO纳米粒子，得到掺有CuO的ZnO气体敏感膜 纳米颗粒。 上述制备方法具有以下优点：成膜质量好，制备工艺简单，成本低，易于控制。

公开(公告)号：US20160123944A1

公开(公告)日：2016-05-05

申请号：US14896342

申请日：2013-06-05

申请人： INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES

发明人： Dongmei LI ,  Shuang ZHAN ,  Shengfa LIANG ,  Xin CHEN ,  Changqing XIE ,  Ming LIU

IPC分类号： G01N33/00

CPC分类号： G01N33/0036 ,  G01N27/00 ,  G01N27/12 ,  G01N33/0037

摘要： A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.

摘要翻译： 一种用于在室温下检测的NO 2气体传感器的制造方法包括：在柔性基板的表面上制造金属电极; 制造SWCNTs / SnO2敏感膜; 并将SWCNTs / SnO2敏感膜与柔性基板表面的一部分与金属电极接合，以便形成用于在室温下检测的NO 2气体传感器。 本公开解决了敏感材料与柔性基板之间的粘合性差，分布不均匀的问题，并且实现了敏感材料与柔性基板之间的牢固结合的目的，并且均匀分布。