公开(公告)号：US20030197312A1

公开(公告)日：2003-10-23

申请号：US10127373

申请日：2002-04-22

申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION

发明人： Gareth Hougham ,  Peter Fryer ,  Ronald Nunes ,  Mary Beth Rothwell

IPC分类号： B29C035/08

CPC分类号： B29C35/0888 ,  B29C35/007 ,  B29C35/18 ,  B29C2035/0827 ,  B29C2791/004 ,  B29K2021/00 ,  B29K2105/0002

摘要： A process of making a high precision microcontact printing stamp in which an elastomeric monomer or oligomer is introduced into a mold wherein a photoresist master imprinted with a microcircuit design in negative relief is predisposed. The monomer or oligomer is cured at a temperature no higher than about ambient temperature whereby a distortion-free microcontact printing stamp having the microcircuit design of the photoresist master in positive relief is formed.

摘要翻译： 制造高精度微接触印刷印模的方法，其中将弹性体单体或低聚物引入模具中，其中用负浮雕的微电路设计印刷的光致抗蚀剂母版是易于发生的。 单体或低聚物在不高于约环境温度的温度下固化，由此形成具有正浮雕的光致抗蚀剂母版的微电路设计的无变形微接触印刷印模。

公开(公告)号：US20040150129A1

公开(公告)日：2004-08-05

申请号：US10127375

申请日：2002-04-22

申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION

发明人： Gareth Hougham ,  Peter Fryer ,  Ronald Nunes ,  Mary Beth Rothwell

IPC分类号： B29C031/04 ,  B29C039/24

CPC分类号： B29C39/003 ,  B29C39/42 ,  B29L2031/756 ,  B29L2031/767 ,  B41C1/003 ,  B41M1/04 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H05K3/1275 ,  H05K2201/0133 ,  H05K2203/0108

摘要： A process of making a microcontact printing stamp useful in the microcontact printing of a microcircuit. In this process an elastomeric microcontact printing stamp is formed by curing a degassed liquid elastomeric monomer or oligomer, optionally saturated with helium, a mixture of helium and an inert gas or a mixture of hydrogen and an inert gas, in a mold in which a photoresist master, defining a microcircuit in negative relief, is predisposed above a backplane.

摘要翻译： 制作微接触印刷印章的过程可用于微电路的微接触印刷。 在该方法中，通过将脱气的液体弹性体单体或低聚物，任选饱和的氦气，氦和惰性气体的混合物或氢气和惰性气体的混合物固化在其中光致抗蚀剂 主人，定义一个负电荷的微电路，倾向于背板上方。

公开(公告)号：US20030196748A1

公开(公告)日：2003-10-23

申请号：US10127374

申请日：2002-04-22

申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION

发明人： Gareth Hougham ,  Peter Fryer ,  Ronald Nunes ,  Mary Beth Rothwell

IPC分类号： B32B031/00

CPC分类号： B32B43/006 ,  B29C39/10 ,  B29C39/126 ,  B29L2031/756 ,  B29L2031/757 ,  B32B37/12 ,  B32B2310/0831 ,  B32B2310/0843 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H05K3/1275 ,  H05K2201/0133 ,  H05K2203/0108 ,  Y10S156/922 ,  Y10T156/11

摘要： A process of making a microcontact printing stamp useful in microcontact printing of microcircuits. In this process an elastomeric microcontact printing stamp is formed by curing an elastomeric monomer or oligomer in a mold in which a photoresist master, defining a microcircuit in negative relief, is predisposed above a flat and rigid backplane laminate. The flat and rigid plane member of the backplane laminate is delaminated from the backplane after the printing stamp is removed from the mold.

摘要翻译： 制作微接触印刷印章的过程可用于微电路的微接触印刷。 在该方法中，通过在模具中固化弹性体单体或低聚物来形成弹性微接触印刷印模，其中将光刻胶母版限定为负凹凸的微电路易于在平坦且刚性的背板层叠体上方。 在从模具中取出打印印模之后，底板层叠体的平坦且刚性的平面构件从背板剥离。