公开(公告)号：US20030015671A1

公开(公告)日：2003-01-23

申请号：US09908925

申请日：2001-07-19

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： David E. Lackey ,  Theodore M. Levin ,  Leah M. Pastel

IPC: G21G005/00 ,  A61N005/00

CPC classification number: H01J37/3056 ,  H01J2237/304 ,  H01J2237/31737 ,  H01J2237/31742

Abstract: An apparatus for assisting backside focused ion beam (FIB) device modification is disclosed. The apparatus for assisting backside FIB device modification includes an FIB device modification circuit and a control circuit. The FIB device modification circuit includes an input, an output, an FIB input pad, and an FIB output pad. The FIB device modification circuit allows the input to be electrically connected to the output. The control circuit, which is coupled to the FIB device modification circuit, may include a jumper and a cut. The control circuit is preferably located in a proximity of a backside of a substrate to allow the jumper and the cut to be modified by an FIB machine.