公开(公告)号：US06535663B1

公开(公告)日：2003-03-18

申请号：US09619013

申请日：2000-07-19

Applicant: Igal Roberto Chertkow

Inventor： Igal Roberto Chertkow

IPC: G02B642

CPC classification number: H04Q11/0005 ,  B81B3/0021 ,  B81B2201/045 ,  B81B2203/051 ,  B81C1/00214 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/423 ,  H01H2001/0084 ,  H04Q2011/003

Abstract: A microelectromechanical (MEMS) device has a substrate, and a generally planar moving element, such as a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.

Abstract translation: 微机电（MEMS）器件具有平行于衬底的表面设置的衬底和大致平面的移动元件，例如反射镜。 致动器可操作地与移动元件接合，用于在垂直于基板的表面的平面中的第一位置和该平面中的第二位置之间选择性地启动移动元件。 MEMS器件可以有效地用作光开关。 可以使用各种不同的致动器。 优选地，使用表面微加工工艺制造该装置。

公开(公告)号：US06658177B1

公开(公告)日：2003-12-02

申请号：US09619014

申请日：2000-07-19

Applicant: Igal Roberto Chertkow

Inventor： Igal Roberto Chertkow

IPC: G02B626

CPC classification number: G02B6/3518 ,  G02B6/3514 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/423 ,  H01H2001/0084 ,  H04Q11/0005 ,  H04Q2011/0026 ,  H04Q2011/003 ,  H04Q2011/0056

Abstract: A switching device that receives a plurality of input signals and provides a plurality of output signals has switches arranged in a two- or three-dimensional array configurations. At least two of the switches, which are preferably microelectromechanical or MEMS switches, reside on distinct physical substrate layers in the switching device, and at least one of the signals travels through a penetrable zone of one of the physical substrate layers. Three dimensional switching device blocks can be conveniently arranged in a Clos configuration or other switching configurations to reduce blocking and avoid rearrangement. The switching devices may be used to switch optical signals and may include mirrors as switching elements.

Abstract translation: 接收多个输入信号并提供多个输出信号的开关装置具有以二维或三维阵列配置布置的开关。 优选地，微机电或MEMS开关中的至少两个开关驻留在开关器件中的不同的物理衬底层上，并且至少一个信号行进通过物理衬底层之一的可穿透区域。 三维切换设备块可以方便地布置在Clos配置或其他交换配置中，以减少阻塞并避免重新排列。 开关器件可用于切换光信号，并且可以包括反射镜作为开关元件。