公开(公告)号：US08473206B2

公开(公告)日：2013-06-25

申请号：US12114047

申请日：2008-05-02

申请人： In Jun Kim ,  Won Chan Jung ,  Jae Hoon Kim

发明人： In Jun Kim ,  Won Chan Jung ,  Jae Hoon Kim

IPC分类号： G01C21/00

CPC分类号： H04B7/18597

摘要： Provided are an apparatus and method for executing a telecommand on a geostationary satellite, and an apparatus and method for verifying a telecommand execution status on a geostationary satellite ground control system. When a telecommand on a satellite is executed, the satellite generates command execution verification words for the executed telecommand and adds the generated command execution verification words to a telemetry transfer frame, and thus a satellite ground control system can easily verify the telecommand execution. In addition, when telecommand execution result is verified by a satellite ground control system, since an execution result of a time-tag telecommand can be verified without a time delay through command execution verification words provided by a satellite, and a telecommand image DB, a telecommand verifier DB, and a telecommand verifier provided by the satellite ground control system, a series of processes from transmission to verification of a telecommand, in particular a time-tag telecommand, can be automatically processed in real-time without intervention of an operator.

摘要翻译： 提供了一种用于在对地静止卫星上执行遥控的装置和方法，以及用于验证地球静止卫星地面控制系统上的遥控执行状态的装置和方法。 当执行卫星上的遥控时，卫星产生用于所执行的遥控命令的命令执行验证字，并将生成的命令执行验证字添加到遥测传输帧，因此卫星地面控制系统可以容易地验证遥控执行。 此外，当遥控执行结果由卫星地面控制系统验证时，由于通过由卫星提供的命令执行验证字和遥控图像DB可以无时间地验证时间标签遥控的执行结果，因此， 遥控器验证器DB和由卫星地面控制系统提供的遥控器验证器，可以在无需操作人员干预的情况下实时自动处理从传输到电话命令验证的一系列处理过程，特别是时间标签遥控。

公开(公告)号：US20090015466A1

公开(公告)日：2009-01-15

申请号：US12114047

申请日：2008-05-02

申请人： In Jun Kim ,  Won Chan Jung ,  Jae Hoon Kim

发明人： In Jun Kim ,  Won Chan Jung ,  Jae Hoon Kim

IPC分类号： H04B7/185

CPC分类号： H04B7/18597

摘要： Provided are an apparatus and method for executing a telecommand on a geostationary satellite, and an apparatus and method for verifying a telecommand execution status on a geostationary satellite ground control system. When a telecommand on a satellite is executed, the satellite generates command execution verification words for the executed telecommand and adds the generated command execution verification words to a telemetry transfer frame, and thus a satellite ground control system can easily verify the telecommand execution. In addition, when telecommand execution result is verified by a satellite ground control system, since an execution result of a time-tag telecommand can be verified without a time delay through command execution verification words provided by a satellite, and a telecommand image DB, a telecommand verifier DB, and a telecommand verifier provided by the satellite ground control system, a series of processes from transmission to verification of a telecommand, in particular a time-tag telecommand, can be automatically processed in real-time without intervention of an operator.

摘要翻译： 提供了一种用于在对地静止卫星上执行遥控的装置和方法，以及用于验证地球静止卫星地面控制系统上的遥控执行状态的装置和方法。 当执行卫星上的遥控时，卫星产生用于所执行的遥控命令的命令执行验证字，并将生成的命令执行验证字添加到遥测传输帧，因此卫星地面控制系统可以容易地验证遥控执行。 此外，当遥控执行结果由卫星地面控制系统验证时，由于通过由卫星提供的命令执行验证字和遥控图像DB可以无时间地验证时间标签遥控的执行结果，因此， 遥控器验证器DB和由卫星地面控制系统提供的遥控器验证器，可以在无需操作人员干预的情况下实时自动处理从传输到电话命令验证的一系列处理过程，特别是时间标签遥控。

公开(公告)号：US08655870B2

公开(公告)日：2014-02-18

申请号：US13589332

申请日：2012-08-20

申请人： In Jun Kim ,  Byoung Sun Lee ,  Jae Hoon Kim

发明人： In Jun Kim ,  Byoung Sun Lee ,  Jae Hoon Kim

IPC分类号： G06F17/30

CPC分类号： H04L67/06

摘要： A telemetry data retrieval apparatus and method for post-processing are provided. The telemetry data retrieval apparatus may include a retrieval initiating unit to receive an input of a retrieval time, and to calculate a percentage of the retrieval time during an entire retrieval period, a start position calculating unit to calculate a retrieval start position in which data retrieval is started within a stored file, based on the calculated percentage, and a telemetry data retrieval unit to verify a start pattern and a time tag from the calculated retrieval start position, and to retrieve a position of telemetry data in the stored file.

摘要翻译： 提供了用于后处理的遥测数据检索装置和方法。 遥测数据检索装置可以包括：检索启动单元，用于接收检索时间的输入，并计算整个检索期间的检索时间的百分比;起始位置计算单元，用于计算数据检索的检索开始位置; 基于所计算的百分比在存储的文件内开始，以及遥测数据检索单元，用于从所计算的检索开始位置验证起始模式和时间标签，并且检索所存储的文件中的遥测数据的位置。

公开(公告)号：US20080057726A1

公开(公告)日：2008-03-06

申请号：US11892754

申请日：2007-08-27

申请人： In Jun Kim

发明人： In Jun Kim

IPC分类号： H01L21/461 ,  C25F1/00 ,  H01L21/306

CPC分类号： C23C16/4402 ,  C23C16/4405

摘要： An apparatus and a method for fabricating a semiconductor device are provided. The method can efficiently remove by-products from a foreline connected to a process chamber. The apparatus includes a remote plasma source, which generates a plasma gas. The plasma gas is guided to the foreline, so as to remove impurities formed on an inner wall of the foreline.

摘要翻译： 提供了一种用于制造半导体器件的装置和方法。 该方法可以有效地从连接到处理室的前级管线中除去副产物。 该装置包括产生等离子体气体的远程等离子体源。 等离子体气体被引导到前级管线，以便除去形成在前级管线的内壁上的杂质。

公开(公告)号：US07580238B2

公开(公告)日：2009-08-25

申请号：US12122496

申请日：2008-05-16

申请人： In Jun Kim

发明人： In Jun Kim

IPC分类号： H01T23/00

CPC分类号： H01L21/683 ,  Y10T279/23

摘要： An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those of other regions, at least one specific region of a dielectric having a thickness relatively larger than those of other regions, or at least one specific region of a conductor having a thickness relatively smaller than those of other regions and at least one specific region of a dielectric having a thickness relatively larger than those of other regions. Therefore, etching rate and CD uniformity can be improved during a semiconductor manufacturing process.

摘要翻译： 根据本发明的示例性实施例的静电卡盘结构可以包括具有比其他区域的厚度相对更小的厚度的导体的至少一个特定区域，电介质的至少一个特定区域具有比其他区域的厚度更大的厚度 区域，或导体的至少一个特定区域，其厚度比其他区域的厚度相对更小，并且电介质的至少一个特定区域具有比其它区域的厚度更大的厚度。 因此，在半导体制造过程中可以提高蚀刻速率和CD均匀性。