SILICON CARBIDE DEVICES AND METHODS FOR FORMING SILICON CARBIDE DEVICES

    公开(公告)号:US20200098869A1

    公开(公告)日:2020-03-26

    申请号:US16576042

    申请日:2019-09-19

    Abstract: A silicon carbide device includes a transistor cell with a front side doping region, a body region, and a drift region. The body region includes a first portion having a first average net doping concentration and a second portion having a second average net doping concentration. The first portion and the second portion have an extension of at least 50 nm in a vertical direction. The first average net doping concentration is at least two times the second average net doping concentration, and the first average net doping concentration is at least 1·1017 cm−3.

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