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公开(公告)号：US20110211613A1
公开(公告)日：2011-09-01
申请号：US13061670
申请日：2009-07-02
申请人： Ingo Herrmann , Daniel Herrmann , Frank Freund , Ando Feyh , Martin Eckardt
发明人： Ingo Herrmann , Daniel Herrmann , Frank Freund , Ando Feyh , Martin Eckardt
IPC分类号： G01K7/01
CPC分类号： H01L27/14669 , G01J5/02 , G01J5/0225 , G01J5/024 , G01J5/06 , G01J5/20 , H01L31/09
摘要： A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.
摘要翻译： 一种用于具有基底和电介质膜的传感器中的微结构参考元件。 参考元件具有基于温度改变其值的电性质。 参考元件相对于衬底布置，使得参考元件（i）与衬底电绝缘，和（ii）热耦合到衬底。 参考元件布置在电介质膜的下侧。 衬底的参考元件和侧壁在它们之间限定周向的洞穴，它们也被布置在它们之间的电介质膜界定。 电介质膜与基板连接。 由电介质膜覆盖的参考元件的表面积大于或等于可能可覆盖表面积的10％且小于或等于100％。 由电介质膜覆盖的洞穴的表面大于或等于可能可覆盖表面的50％且小于或等于100％。 面向电介质膜的参考元件的边缘具有大于或等于其与电介质膜接触的程度的50％且小于或等于100％。 面向电介质膜的洞穴的侧壁的截面具有大于或等于电介质膜接触的可能尺寸的50％且小于或等于100％。
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公开(公告)号：US20100051810A1
公开(公告)日：2010-03-04
申请号：US12541745
申请日：2009-08-14
申请人： Ingo Herrmann , Karl-Franz Reinhart , Daniel Herrmann , Frank Freund , Ando Feyh , Martin Eckardt
发明人： Ingo Herrmann , Karl-Franz Reinhart , Daniel Herrmann , Frank Freund , Ando Feyh , Martin Eckardt
CPC分类号： B81C1/00293 , B81C2203/019
摘要： A micromechanical component and a corresponding production method. The micromechanical component includes a first component and a second component, with which the first component is connected by an alloy region; the first and second components enclosing a vacuum region or residual gas region, which is sealed by the alloy region.
摘要翻译： 微机械部件和相应的生产方法。 微机械部件包括第一部件和第二部件，第一部件通过第一部件和第二部件通过合金区域连接; 第一和第二部件包围由合金区域密封的真空区域或残余气体区域。
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公开(公告)号：US08556504B2
公开(公告)日：2013-10-15
申请号：US13061670
申请日：2009-07-02
申请人： Ingo Herrmann , Daniel Herrmann , Frank Freund , Ando Feyh , Martin Eckardt
发明人： Ingo Herrmann , Daniel Herrmann , Frank Freund , Ando Feyh , Martin Eckardt
CPC分类号： H01L27/14669 , G01J5/02 , G01J5/0225 , G01J5/024 , G01J5/06 , G01J5/20 , H01L31/09
摘要： A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.
摘要翻译： 一种用于具有基底和电介质膜的传感器中的微结构参考元件。 参考元件具有基于温度改变其值的电性质。 参考元件相对于衬底布置，使得参考元件（i）与衬底电绝缘，和（ii）热耦合到衬底。 参考元件布置在电介质膜的下侧。 衬底的参考元件和侧壁在它们之间限定周向的洞穴，它们也被布置在它们之间的电介质膜界定。 电介质膜与基板连接。 由电介质膜覆盖的参考元件的表面积大于或等于可能可覆盖表面积的10％且小于或等于100％。 由电介质膜覆盖的洞穴的表面大于或等于可能可覆盖表面的50％且小于或等于100％。 面向电介质膜的参考元件的边缘具有大于或等于其与电介质膜接触的程度的50％且小于或等于100％。 面向电介质膜的洞穴的侧壁的截面具有大于或等于电介质膜接触的可能尺寸的50％且小于或等于100％。
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公开(公告)号：US20090288498A1
公开(公告)日：2009-11-26
申请号：US12387659
申请日：2009-05-05
IPC分类号： G01D7/00
CPC分类号： G01D5/14 , G06K9/00013 , G06K9/00973
摘要： A sensor system has a first sensor-element block and a second sensor-element block, at least one first sensor element and one second sensor element are assigned to the first sensor-element block, and at least one third sensor element is assigned to the second sensor-element block. The third sensor element is situated between the first and second sensor elements.
摘要翻译： 传感器系统具有第一传感器元件块和第二传感器元件块，至少一个第一传感器元件和一个第二传感器元件被分配给第一传感器元件块，并且至少一个第三传感器元件被分配给 第二传感器元件块。 第三传感器元件位于第一和第二传感器元件之间。
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公开(公告)号：US08695442B2
公开(公告)日：2014-04-15
申请号：US12387659
申请日：2009-05-05
IPC分类号： G01D7/00
CPC分类号： G01D5/14 , G06K9/00013 , G06K9/00973
摘要： A sensor system has a first sensor-element block and a second sensor-element block, at least one first sensor element and one second sensor element are assigned to the first sensor-element block, and at least one third sensor element is assigned to the second sensor-element block. The third sensor element is situated between the first and second sensor elements.
摘要翻译： 传感器系统具有第一传感器元件块和第二传感器元件块，至少一个第一传感器元件和一个第二传感器元件被分配给第一传感器元件块，并且至少一个第三传感器元件被分配给 第二传感器元件块。 第三传感器元件位于第一和第二传感器元件之间。
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公开(公告)号：US20090129440A1
公开(公告)日：2009-05-21
申请号：US11921669
申请日：2006-06-13
申请人： Bernhard Opitz , Ando Feyh , Daniel Herrmann , Oliver Wolst
发明人： Bernhard Opitz , Ando Feyh , Daniel Herrmann , Oliver Wolst
CPC分类号： G01J5/10 , G01J5/20 , G01K7/015 , G01N27/14 , Y10T29/49117
摘要： A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.
摘要翻译： 传感器，特别是热传感器和/或气体传感器，其包含具有温度依赖性变化的电特性的电传感器部件，其中温度依赖性电性能是电阻或阻抗。 通过多孔硅和/或通过电解抛光制造的空腔来实现活性结构与衬底的热和电去耦合。
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公开(公告)号：US08007169B2
公开(公告)日：2011-08-30
申请号：US11921669
申请日：2006-06-13
申请人： Bernhard Opitz , Ando Feyh , Daniel Herrmann , Oliver Wolst
发明人： Bernhard Opitz , Ando Feyh , Daniel Herrmann , Oliver Wolst
IPC分类号： G01K7/00
CPC分类号： G01J5/10 , G01J5/20 , G01K7/015 , G01N27/14 , Y10T29/49117
摘要： A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.
摘要翻译： 传感器，特别是热传感器和/或气体传感器，其包含具有温度依赖性变化的电特性的电传感器部件，其中温度依赖性电性能是电阻或阻抗。 通过多孔硅和/或通过电解抛光制造的空腔来实现活性结构与衬底的热和电去耦合。
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