公开(公告)号：US12105277B2

公开(公告)日：2024-10-01

申请号：US17282199

申请日：2019-10-03

Applicant: Innoviz Technologies Ltd.

Inventor： Yair Alpern ,  Michael Girgel

IPC: G02B26/08 ,  B81B7/00 ,  G01S7/481 ,  G02B26/10 ,  H05B1/02 ,  H05B3/18 ,  G01S17/931 ,  H10N30/20

CPC classification number: G02B26/0858 ,  B81B7/0087 ,  G01S7/4817 ,  G02B26/105 ,  H05B1/023 ,  H05B3/18 ,  G01S17/931 ,  H10N30/204

Abstract: A microelectromechanical system (MEMS) mirror assembly may comprise a frame and a MEMS mirror coupled to the frame. The MEMS mirror assembly may also include at least one piezoelectric actuator including a body and a piezoelectric element. When subjected to an electrical field, the piezoelectric element may be configured to bend the body, thereby moving the MEMS mirror with respect to a plane of the frame. The MEMS mirror assembly may further include at least one heating resistor configured to heat the piezoelectric element when an electric current passes through the at least one heating resistor.

公开(公告)号：US11604263B2

公开(公告)日：2023-03-14

申请号：US16830012

申请日：2020-03-25

Applicant: INNOVIZ TECHNOLOGIES LTD

Inventor： Ronen Eshel ,  Michael Girgel

IPC: G01S7/00 ,  G01S7/481 ,  G01S17/931 ,  G01H1/00 ,  G01S17/10 ,  G01S7/4863 ,  G01S7/4914 ,  G01S17/32 ,  G01S17/58 ,  G01S7/48 ,  G01S7/484 ,  G01S7/4911 ,  G01S17/42 ,  B81B3/00 ,  B60S1/02 ,  G01S7/497 ,  G01S17/06 ,  G01S17/89 ,  G02B26/12

Abstract: A MEMS scanning device may include: a movable MEMS mirror configured to pivot about at least one axis; at least one actuator operable to rotate the MEMS mirror about the at least one axis, each actuator out of the at least one actuator operable to bend upon actuation to move the MEMS mirror; and at least one flexible interconnect element coupled between the at least one actuator and the MEMS mirror for transferring a pulling force of the bending of the at least one actuator to the MEMS mirror. Each flexible interconnect element out of the at least one interconnect element may be an elongated structure comprising at least two turns at opposing directions, each turn greater than 120°.

公开(公告)号：US20220404471A1

公开(公告)日：2022-12-22

申请号：US17753818

申请日：2020-09-17

Applicant: INNOVIZ TECHNOLOGIES LTD.

Inventor： Yair Alpern ,  Michael Girgel ,  Nir Goren ,  Yuval Stern ,  John Miller ,  Sason Sourani

IPC: G01S7/481 ,  G01B7/30 ,  G01S17/931 ,  G02B26/10 ,  G02B26/08

Abstract: An electro-optical system may include a light source configured to emit a beam of radiation, and a pivotable scanning mirror configured to project the beam of radiation toward a field of view. The electro-optical system may also include a first electrode associated with the scanning mirror, and a plurality of second electrodes spaced apart from the first electrode. The electro-optical system may further include a processor programmed to determine a capacitance value for each of the second electrodes relative to the first electrode. Each of the determined capacitance values may have an accuracy in a range of ± 1/100 to ± 1/1000 of a difference between a highest capacitance value and a lowest capacitance value between the first electrode and a respective one of the second electrodes. The processor may also be programmed to determine an orientation of the scanning mirror based on one or more of the determined capacitance values.