PIVOTABLE MEMS DEVICE HAVING A FEEDBACK MECHANISM

    公开(公告)号:US20220404471A1

    公开(公告)日:2022-12-22

    申请号:US17753818

    申请日:2020-09-17

    Abstract: An electro-optical system may include a light source configured to emit a beam of radiation, and a pivotable scanning mirror configured to project the beam of radiation toward a field of view. The electro-optical system may also include a first electrode associated with the scanning mirror, and a plurality of second electrodes spaced apart from the first electrode. The electro-optical system may further include a processor programmed to determine a capacitance value for each of the second electrodes relative to the first electrode. Each of the determined capacitance values may have an accuracy in a range of ± 1/100 to ± 1/1000 of a difference between a highest capacitance value and a lowest capacitance value between the first electrode and a respective one of the second electrodes. The processor may also be programmed to determine an orientation of the scanning mirror based on one or more of the determined capacitance values.

    DEFLECTOR FEEDBACK CONTROL IN LIDAR
    4.
    发明申请

    公开(公告)号:US20190271769A1

    公开(公告)日:2019-09-05

    申请号:US16358247

    申请日:2019-03-19

    Abstract: Systems and methods are provided related to LIDAR technology. In one implementation, a vibration suppression system for a LIDAR configured for use on a vehicle includes at least one processor configured to: control at least one light source in a manner enabling light flux of light from the at least one light source to vary over scans of a field of view; control positioning of at least one light deflector to deflect light from the at least one light source in order to scan the field of view; obtain data indicative of vibrations of the vehicle; based on the obtained data, determine adjustments to the positioning of the at least one light deflector for compensating for the vibrations of the vehicle; and implement the determined adjustments to the positioning of the at least one light deflector to thereby suppress on the at least one light deflector, at least part of an influence of the vibrations of the vehicle on the scanning of the field of view.

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