Polysilicon doping controlled 3D NAND etching

    公开(公告)号:US10096610B1

    公开(公告)日:2018-10-09

    申请号:US15721544

    申请日:2017-09-29

    Abstract: A 3D NAND storage device includes a plurality of layers containing doped semiconductor material interleaved with a plurality of layers of dielectric material. A first portion of the plurality of doped semiconductor material layers may be doped with a first dopant having a first dopant parameter. A second portion of the plurality of doped semiconductor material layers may be doped with a second dopant having a second dopant parameter. In embodiments, the first portion of the plurality of doped semiconductor layers may include a dopant at a concentration less than a defined threshold. In embodiments, the second portion of the plurality of doped semiconductor layers may include a dopant at a concentration less than the defined threshold. The differing dopant concentrations have been found to beneficially and advantageously affect the etch rate in the respective semiconductor layers when forming control gate recesses in the semiconductor layers.

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