公开(公告)号：US20140090668A1

公开(公告)日：2014-04-03

申请号：US14096282

申请日：2013-12-04

Applicant: Intermolecular, Inc.

Inventor： Gregory Lim ,  Aaron Francis ,  Kenneth Williams

IPC: H01L21/67

CPC classification number: H01L21/67057 ,  H01L21/67051 ,  H01L21/6719

Abstract: A cleaning chamber is provided. The cleaning chamber includes a base portion housing a chuck and a lid affixed to the base portion. A support assembly is linked to the lid and the support assembly includes a top plate spaced apart from a bottom plate, the top plate has a plurality of openings defined therethrough and the bottom plate has a plurality of openings defined therethrough. The cleaning chamber includes a plurality of cups extending through corresponding pairs of the plurality of openings of the top plate and the bottom plate. The plurality of cups is configured to seal against a surface of a substrate, wherein each cup of the plurality of cups is independently supported by the bottom plate.

Abstract translation: 提供清洁室。 清洁室包括容纳卡盘的基座部分和固定到基部的盖子。 支撑组件连接到盖，并且支撑组件包括与底板间隔开的顶板，顶板具有限定穿过其中的多个开口，并且底板具有穿过其中限定的多个开口。 清洁室包括延伸穿过顶板和底板的多个开口的相应对的多个杯。 多个杯被配置为密封衬底的表面，其中多个杯的每个杯独立地由底板支撑。