公开(公告)号：US20150056780A1

公开(公告)日：2015-02-26

申请号：US14506166

申请日：2014-10-03

申请人： Intermolecular, Inc.

发明人： Rajesh Kelekar ,  Aaron Francis ,  Gregory Lim

IPC分类号： H01L21/76

CPC分类号： H01L21/76 ,  H01L21/02 ,  H01L21/306 ,  H01L21/67017

摘要： Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.

摘要翻译： 重叠组合处理可以提供更多的处理区域，更好的粒子性能和更简单的工艺设备。 在重叠组合处理中，一个或多个区域与区域之间的一些重叠程度串联处理。 在一些实施例中，重叠的组合处理可以结合非重叠的组合处理和非组合处理来使用，以开发和研究用于设备处理和制造的材料和过程。

公开(公告)号：US20140090668A1

公开(公告)日：2014-04-03

申请号：US14096282

申请日：2013-12-04

申请人： Intermolecular, Inc.

发明人： Gregory Lim ,  Aaron Francis ,  Kenneth Williams

IPC分类号： H01L21/67

CPC分类号： H01L21/67057 ,  H01L21/67051 ,  H01L21/6719

摘要： A cleaning chamber is provided. The cleaning chamber includes a base portion housing a chuck and a lid affixed to the base portion. A support assembly is linked to the lid and the support assembly includes a top plate spaced apart from a bottom plate, the top plate has a plurality of openings defined therethrough and the bottom plate has a plurality of openings defined therethrough. The cleaning chamber includes a plurality of cups extending through corresponding pairs of the plurality of openings of the top plate and the bottom plate. The plurality of cups is configured to seal against a surface of a substrate, wherein each cup of the plurality of cups is independently supported by the bottom plate.

摘要翻译： 提供清洁室。 清洁室包括容纳卡盘的基座部分和固定到基部的盖子。 支撑组件连接到盖，并且支撑组件包括与底板间隔开的顶板，顶板具有限定穿过其中的多个开口，并且底板具有穿过其中限定的多个开口。 清洁室包括延伸穿过顶板和底板的多个开口的相应对的多个杯。 多个杯被配置为密封衬底的表面，其中多个杯的每个杯独立地由底板支撑。

公开(公告)号：US20150235875A1

公开(公告)日：2015-08-20

申请号：US14701861

申请日：2015-05-01

申请人： Intermolecular, Inc.

发明人： Kurt Weiner ,  Aaron Francis ,  Ken Williams

IPC分类号： H01L21/67 ,  B01J19/00 ,  H01L21/687

CPC分类号： H01L21/6715 ,  B01J19/0046 ,  B01J2219/00351 ,  B01J2219/00481 ,  B01J2219/00585 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/6719 ,  H01L21/68778

摘要： A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.

摘要翻译： 提供了具有模块化分配头的组合处理系统。 模块化分配头设置在轨道系统上，使得用于组合处理的模块化分配头的可调节距。 模块化分配头被配置为使得模块化分配头的部分可拆卸以便通过第一部分适应各种过程，而不必完全断开并将设备重新连接到第二部分。

公开(公告)号：US20150101683A1

公开(公告)日：2015-04-16

申请号：US14576655

申请日：2014-12-19

申请人： Intermolecular, Inc.

发明人： Aaron Francis

IPC分类号： F15D1/00

CPC分类号： F15D1/00 ,  H01L21/67057 ,  H01L21/67086 ,  Y10T137/0318 ,  Y10T137/2224 ,  Y10T137/6851

摘要： A gas bearing seal using porous materials for distribution of gas flow can provide site isolation during wet processing. In some embodiments, a flow cell comprises a porous media gas bearing surrounding a periphery of the flow cell, isolating the liquid inside the flow cell from the ambient air outside the flow cell. In some embodiments, a protective chuck comprises a porous media gas bearing disposed in a middle of the protective chuck, isolating the liquid outside the protective chuck with the gaseous ambient generated by the porous media gas bearing.

摘要翻译： 使用多孔材料分配气体流量的气体轴承密封可以在湿法加工过程中提供现场隔离。 在一些实施例中，流动池包括围绕流动池的周边的多孔介质气体轴承，将流动池内的液体与流动池外部的环境空气隔离。 在一些实施例中，保护卡盘包括设置在保护卡盘中间的多孔介质气体轴承，将保护卡盘外部的液体与由多孔介质气体轴承产生的气体环境隔离。