公开(公告)号：US08829626B2

公开(公告)日：2014-09-09

申请号：US14017646

申请日：2013-09-04

Applicant: International Buisness Machines Corporation

Inventor： Jeffrey P. Gambino ,  Stephen A. Mongeon

IPC: H01L27/14 ,  H01L29/84 ,  G01P15/08

CPC classification number: H01H59/0009 ,  B81B2201/014 ,  B81B2203/051 ,  B81C1/00293 ,  B81C2203/0145 ,  H01H2001/0052 ,  H01H2059/0027

Abstract: MEMS switches and methods of fabricating MEMS switches. The switch has a vertically oriented deflection electrode having a conductive layer supported by a supporting layer, at least one drive electrode, and a stationary electrode. An actuation voltage applied to the drive electrode causes the deflection electrode to deflect laterally and contact the stationary electrode, which closes the switch. The deflection electrode is restored to a vertical position when the actuation voltage is removed, thereby opening the switch. The method of fabricating the MEMS switch includes depositing a conductive layer on mandrels to define vertical electrodes and then releasing the deflection electrode by removing the mandrel and layer end sections.

Abstract translation: MEMS开关和制造MEMS开关的方法。 开关具有垂直取向的偏转电极，其具有由支撑层支撑的导电层，至少一个驱动电极和固定电极。 施加到驱动电极的致动电压导致偏转电极横向偏转并接触闭合开关的固定电极。 当去除致动电压时，偏转电极恢复到垂直位置，从而打开开关。 制造MEMS开关的方法包括在心轴上沉积导电层以限定垂直电极，然后通过去除心轴和层端部来释放偏转电极。