公开(公告)号：US20170260039A1

公开(公告)日：2017-09-14

申请号：US15609757

申请日：2017-05-31

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Antonio MOLFESE

IPC: B81B3/00 ,  G01P1/00 ,  G01P15/125

CPC classification number: G01P15/125 ,  B81B7/008 ,  G01P2015/0831

Abstract: A MEMS sensor includes a sensing reference plane, an anchor, a proof mass, and sensing elements. The anchor is coupled to the sensing reference plane and to the proof mass that moves under an external excitation. The sensing elements detect motion normal to the sensing reference plane. A summation of a product of polarity for each sensing element, its area, and its distance to the anchor on one side of an axis line is unequal to a summation of a product of a polarity associated with each sensing element, its associated area, and its distance to the anchor on another side of the axis line. As such, external excitation creates an offset. The offset is substantially constant for curvature angles)(0°-360°) of the sensing reference plane. The offset is greater than zero and is less than a maximum offset for a MEMS sensor with perfect symmetry for its sensing elements.