公开(公告)号：US09846175B2

公开(公告)日：2017-12-19

申请号：US14606858

申请日：2015-01-27

Applicant: InvenSense, Inc.

Inventor： Steven S. Nasiri ,  Goksen G. Yaralioglu ,  Joseph Seeger ,  Babak Taheri

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  B60R21/0132

CPC classification number: G01P15/0888 ,  B60R2021/01327 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

公开(公告)号：US20190226848A1

公开(公告)日：2019-07-25

申请号：US16373086

申请日：2019-04-02

Applicant: InvenSense, Inc.

Inventor： Steven S. Nasiri ,  David Sachs ,  Babak Taheri

IPC: G01C19/5776 ,  G01C19/5769 ,  G01P15/08 ,  G01P15/125 ,  G01P1/02 ,  G01P15/18

Abstract: A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.

公开(公告)号：US10288427B2

公开(公告)日：2019-05-14

申请号：US14662711

申请日：2015-03-19

Applicant: InvenSense, Inc.

Inventor： Steven S. Nasiri ,  David Sachs ,  Babak Taheri

IPC: G01P1/02 ,  G01P15/18 ,  G01P15/00 ,  G01C19/5776 ,  G01P15/08 ,  G01P15/125 ,  G01C19/5769

Abstract: A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.