Method of polishing a substrate with a polishing system containing conducting polymer
    1.
    发明授权
    Method of polishing a substrate with a polishing system containing conducting polymer 失效
    用含有导电聚合物的抛光系统抛光基材的方法

    公开(公告)号:US07021993B2

    公开(公告)日:2006-04-04

    申请号:US10198841

    申请日:2002-07-19

    IPC分类号: B24B1/00

    摘要: The invention provides a method of polishing a substrate comprising (i) contacting a substrate with a polishing system comprising (a) an abrasive, a polishing pad, a means for oxidizing a substrate, or any combination thereof, (b) a conducting polymer having an electrical conductivity of about 10−10 S/cm to about 106 S/cm, and (c) a liquid carrier, and (ii) abrading or removing at least a portion of the substrate to polish the substrate.

    摘要翻译: 本发明提供一种抛光衬底的方法,其包括(i)使衬底与抛光系统接触,所述抛光系统包括(a)研磨剂,抛光垫,用于氧化衬底的装置或其任何组合,(b)导电聚合物,其具有 约10 -6 S / cm至约10 -6 S / cm的电导率,和(c)液体载体,和(ii)至少研磨或除去 衬底的一部分以抛光衬底。

    Sulfonation of polyphosphazenes
    3.
    发明授权
    Sulfonation of polyphosphazenes 失效
    聚磷腈的磺化

    公开(公告)号:US5548060A

    公开(公告)日:1996-08-20

    申请号:US287174

    申请日:1994-08-08

    IPC分类号: C08G79/02 C08F8/36

    CPC分类号: C08G79/025

    摘要: A method for the alkylsulfonation of polymeric and cyclic trimer phosphazenes that includes reacting the phosphazene with a sultone. This method can be used to prepare sulfonated phosphazenes that are useful as biomedical materials, membranes, reversibly cross-linkable polymers, surfactants, and polyelectrolytes.

    摘要翻译: 聚合和环状三聚磷腈的烷基磺化方法,包括使磷腈与磺内酯反应。 该方法可用于制备可用作生物医学材料,膜,可逆交联的聚合物,表面活性剂和聚电解质的磺化磷腈。