公开(公告)号：US08435594B2

公开(公告)日：2013-05-07

申请号：US12197731

申请日：2008-08-25

申请人： Isamu Konishiike ,  Chisato Okina ,  Keisuke Tanabe ,  Atsuhiro Abe ,  Hidetoshi Nishiyama ,  Kenichi Kawase ,  Shunsuke Kurasawa ,  Koichi Matsumoto

发明人： Isamu Konishiike ,  Chisato Okina ,  Keisuke Tanabe ,  Atsuhiro Abe ,  Hidetoshi Nishiyama ,  Kenichi Kawase ,  Shunsuke Kurasawa ,  Koichi Matsumoto

IPC分类号： B05D5/12 ,  C23C14/00

CPC分类号： C23C14/562 ,  H01M4/0421 ,  H01M4/131 ,  H01M4/1395 ,  H01M4/661 ,  H01M10/052 ,  H01M2200/106

摘要： An evaporation apparatus that is capable of stably forming a good quality thin film and is highly suitable for mass production is provided. The evaporation apparatus include an evaporation source discharging an evaporation material by heating, a retention member retaining an evaporation object, and a heat shield member that is located between the evaporation source and the evaporation object retained by the retention member, has an opening for passing the evaporation material in a state of vapor phase from the evaporation source to the evaporation object, and shields the evaporation object from part of radiation heat of the evaporation source. The heat shield member is located closer to the evaporation source than to the retention member.

摘要翻译： 提供能够稳定地形成优质薄膜并且高度适合批量生产的蒸发装置。 蒸发装置包括通过加热排出蒸发材料的蒸发源，保持蒸发物体的保持构件和位于蒸发源和由保持构件保留的蒸发物体之间的隔热构件，具有用于使蒸发物质通过的开口 从蒸发源到蒸发物体处于气相状态的蒸发材料，并且将蒸发物体与蒸发源的辐射热屏蔽。 隔热构件位于比保持构件更靠近蒸发源的位置。

公开(公告)号：US20090061079A1

公开(公告)日：2009-03-05

申请号：US12197731

申请日：2008-08-25

申请人： Isamu KONISHIIKE ,  Chisato Okina ,  Keisuke Tanabe ,  Atsuhiro Abe ,  Hidetoshi Nishiyama ,  Kenichi Kawase ,  Shunsuke Kurasawa ,  Koichi Matsumoto

发明人： Isamu KONISHIIKE ,  Chisato Okina ,  Keisuke Tanabe ,  Atsuhiro Abe ,  Hidetoshi Nishiyama ,  Kenichi Kawase ,  Shunsuke Kurasawa ,  Koichi Matsumoto

IPC分类号： B05D1/32 ,  B05C11/00

CPC分类号： C23C14/562 ,  H01M4/0421 ,  H01M4/131 ,  H01M4/1395 ,  H01M4/661 ,  H01M10/052 ,  H01M2200/106

摘要： An evaporation apparatus that is capable of stably forming a good quality thin film and is highly suitable for mass production is provided. The evaporation apparatus include an evaporation source discharging an evaporation material by heating, a retention member retaining an evaporation object, and a heat shield member that is located between the evaporation source and the evaporation object retained by the retention member, has an opening for passing the evaporation material in a state of vapor phase from the evaporation source to the evaporation object, and shields the evaporation object from part of radiation heat of the evaporation source. The heat shield member is located closer to the evaporation source than to the retention member.

摘要翻译： 提供能够稳定地形成优质薄膜并且高度适合批量生产的蒸发装置。 蒸发装置包括通过加热排出蒸发材料的蒸发源，保持蒸发物体的保持构件和位于蒸发源和由保持构件保留的蒸发物体之间的隔热构件，具有用于使蒸发物质通过的开口 从蒸发源到蒸发物体处于气相状态的蒸发材料，并且将蒸发物体与蒸发源的辐射热屏蔽。 隔热构件位于比保持构件更靠近蒸发源的位置。