摘要:
An alignment apparatus, which is used when positioning and joining a plurality of workpieces relative to each other, each workpiece having a plurality of alignment marks for alignment, the alignment apparatus includes: a transparent mask provided with reference marks with which the alignment marks are aligned; a mirror disposed between the mask and the workpiece; an optical unit having an optical axis pointed in a direction of the mirror via the reference mark from a side of the mask opposite to the mirror, the optical unit enabling the reference mark and a virtual image of the reference mark reflected in the mirror to be observed simultaneously; andan adjusting unit for making optical axis adjustment of the optical axis, based on the observation by the optical unit, such that a real image of the reference mark and the virtual image of the reference mark reflected in the mirror are superposed.
摘要:
The invention provides a liquid ejecting head alignment apparatus that is used for positional determination and adhesion of nozzle plates and a fixation member, each of the nozzle plates having nozzle openings through which each of a plurality of liquid ejecting heads ejects liquid and further having alignment marks for positional alignment, the fixation member holding the nozzle-plate side of the plurality of liquid ejecting heads. The liquid ejecting head alignment apparatus according to the invention includes: a mask made of a transparent material, the mask having reference marks each of which is aligned with the corresponding alignment mark; a spacer jig that is provided between the fixation member and the mask in such a manner that the reference marks and the alignment marks are opposed to each other with a space being left therebetween, one surface of the spacer jig being in contact with the fixation member; and a bifocal microscope having an optical axis and two optical systems that shares the optical axis, the optical axis being oriented from a face of the mask that is opposite to the spacer jig side thereof toward the alignment mark via the reference mark and the space, one of the optical systems being capable of focusing on the reference mark, and the other thereof being capable of focusing on the alignment mark.
摘要:
An alignment method includes: disposing an alignment mark provided to a positioned member and a reference mark provided to a surface of an alignment mask so that the alignment mark and the reference mark can face each other; capturing an image from the other surface side of the alignment mask, which is the opposite surface of the alignment mask from the surface where the reference mark is disposed, the image concurrently showing the alignment mark and the reference mark; performing a surface treatment on at least a region of the positioned member side of the alignment mask, which is captured as the image, rather than on the reference mark side thereof, the surface treatment providing a high contrast ratio to each alignment mark and reference mark on the captured image; and thereafter aligning the alignment mark with the reference mark, while checking the image.
摘要:
An adjusting unit for making positional adjustment of the optical axis adjustment mask, based on the observation by the one optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed, and for making optical axis adjustment of the other optical axis, based on the observation by the other optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed.
摘要:
An alignment jig for a liquid-jet head, which is used when positioning and joining a nozzle plate and a fixing member, the nozzle plate having nozzle orifices for jetting a liquid of the liquid-jet head and an alignment mark for alignment, the fixing member being adapted to hold a plurality of the liquid-jet heads, the alignment jig comprising a mask which is a transparent member provided with a reference mark for alignment with the alignment mark, the reference mark being formed within the mask.
摘要:
An alignment jig for a liquid-jet head, which is used when positioning and joining a nozzle plate and a fixing member, the nozzle plate having nozzle orifices for jetting a liquid of the liquid-jet head and an alignment mark for alignment, the fixing member being adapted to hold a plurality of the liquid-jet heads, the alignment jig comprising a mask which is a transparent member provided with a reference mark for alignment with the alignment mark, the reference mark being formed within the mask.
摘要:
An alignment apparatus includes a mask 410 which has a reference mark 401 at which an alignment mark 22 of an ink jet recording head 220 is positioned and a bifocal microscope 500 which has a first optical system 501 having an optical axis L1 and a second optical system 502 having an optical axis L2 and in which the first optical system 501 can focus on the reference mark 401 and the second optical system 502 can focus on the alignment mark 22. The bifocal microscope 500 is provided with optical axis adjustment means 520 which adjusts a direction of a reflection face of a second mirror 509 so that the optical axes L1 and L2 coincident with each other are incident to the reference mark 401 and the alignment mark 22.