Method for determining the substitutional carbon content in monocrystalline or polycrystalline silicon
    1.
    发明申请
    Method for determining the substitutional carbon content in monocrystalline or polycrystalline silicon 审中-公开
    确定单晶硅或多晶硅中取代碳含量的方法

    公开(公告)号:US20050211901A1

    公开(公告)日:2005-09-29

    申请号:US11079626

    申请日:2005-03-14

    CPC分类号: G01N21/3563

    摘要: A method for determining the substitutional carbon content (Cs) of a monocrystalline or polycrystalline silicon sample comprises measuring an absorption spectrum of the silicon sample to be studied and of a reference sample and calculatng a differential spectrum from them, wherein the calculated differential spectrum provides a detection threshold of

    摘要翻译: 用于测定单晶或多晶硅样品的取代碳含量(℃)的方法包括测量待研究的硅样品和参考样品的吸收光谱,并从其计算差示光谱 ,其中所计算的差分光谱提供<5PPBA C 的检测阈值。