GAS SENSOR
    4.
    发明公开
    GAS SENSOR 审中-公开

    公开(公告)号:US20240230566A9

    公开(公告)日:2024-07-11

    申请号:US18547505

    申请日:2022-02-15

    CPC classification number: G01N27/04 H01L29/0673

    Abstract: To provide a gas sensor with fast response and high sensitivity to oxygen gas. Disclosed is a gas sensor 100 including: a substrate 10; a first pad electrode 12A and a second pad electrode 12B; a nanowire 14 made of a specific metal; and an oxide layer 16 made of a high-resistance semiconductor that is an oxide of a metal different from a metal constituting the nanowire 14. The first pad electrode 12A and the second pad electrode 12B are formed on or above the substrate 10. The nanowire 14 connects the first pad electrode 12A and the second pad electrode 12B and is formed on or above the substrate 10.
    The oxide layer 16 is formed in contact with the nanowire 14. This contact between the nanowire 14 and the oxide layer 16 provides fast response and high sensitivity to oxygen gas.

    GAS SENSOR
    5.
    发明公开
    GAS SENSOR 审中-公开

    公开(公告)号:US20240133832A1

    公开(公告)日:2024-04-25

    申请号:US18547505

    申请日:2022-02-15

    CPC classification number: G01N27/04 H01L29/0673

    Abstract: To provide a gas sensor with fast response and high sensitivity to oxygen gas. Disclosed is a gas sensor 100 including: a substrate 10; a first pad electrode 12A and a second pad electrode 12B; a nanowire 14 made of a specific metal; and an oxide layer 16 made of a high-resistance semiconductor that is an oxide of a metal different from a metal constituting the nanowire 14. The first pad electrode 12A and the second pad electrode 12B are formed on or above the substrate 10. The nanowire 14 connects the first pad electrode 12A and the second pad electrode 12B and is formed on or above the substrate 10.
    The oxide layer 16 is formed in contact with the nanowire 14. This contact between the nanowire 14 and the oxide layer 16 provides fast response and high sensitivity to oxygen gas.

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