公开(公告)号：US20150303027A1

公开(公告)日：2015-10-22

申请号：US14624881

申请日：2015-02-18

Applicant: JEOL Ltd.

Inventor： Noriyuki Kobayashi ,  Yoshiaki Takizawa

IPC: H01J37/20 ,  H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3174 ,  H01J37/3175 ,  H01J2237/0044 ,  H01J2237/2007

Abstract: A charged-particle beam lithographic system (100) delineates a pattern on a substrate (2) by directing a charged-particle beam (L) at the substrate. The system (100) includes a substrate stage (10) on which the substrate (2) is disposed and a substrate cover (20). The cover (20) has a frame portion (22) that covers an outer peripheral portion of the substrate (2) as viewed within a plane. The frame portion (22) has a first part (22a) disposed on the stage (10) and a second part (22b) capable of being loaded and unloaded on and from the stage (10) by a transport portion (40). When the second part (22b) is loaded on the stage (10), it is electrically grounded.

Abstract translation: 带电粒子束光刻系统（100）通过将带电粒子束（L）引导到衬底上来描绘衬底（2）上的图案。 系统（100）包括其上设置有基板（2）的基板台（10）和基板盖（20）。 盖（20）具有在平面内观察时覆盖基板（2）的外周部的框架部（22）。 框架部分（22）具有设置在平台（10）上的第一部分（22a）和能够通过运输部分（40）装载和卸载在台架（10）上的第二部分（22b）。 当第二部分（22b）装载在平台（10）上时，它被电接地。

公开(公告)号：US09362085B2

公开(公告)日：2016-06-07

申请号：US14624881

申请日：2015-02-18

Applicant: JEOL Ltd.

Inventor： Noriyuki Kobayashi ,  Yoshiaki Takizawa

IPC: H01J37/20 ,  H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3174 ,  H01J37/3175 ,  H01J2237/0044 ,  H01J2237/2007

Abstract: A charged-particle beam lithographic system (100) delineates a pattern on a substrate (2) by directing a charged-particle beam (L) at the substrate. The system (100) includes a substrate stage (10) on which the substrate (2) is disposed and a substrate cover (20). The cover (20) has a frame portion (22) that covers an outer peripheral portion of the substrate (2) as viewed within a plane. The frame portion (22) has a first part (22a) disposed on the stage (10) and a second part (22b) capable of being loaded and unloaded on and from the stage (10) by a transport portion (40). When the second part (22b) is loaded on the stage (10), it is electrically grounded.

Abstract translation: 带电粒子束光刻系统（100）通过将带电粒子束（L）引导到衬底上来描绘衬底（2）上的图案。 系统（100）包括其上设置有基板（2）的基板台（10）和基板盖（20）。 盖（20）具有在平面内观察时覆盖基板（2）的外周部的框架部（22）。 框架部分（22）具有设置在平台（10）上的第一部分（22a）和能够通过运输部分（40）装载和卸载在台架（10）上的第二部分（22b）。 当第二部分（22b）装载在平台（10）上时，它被电接地。