公开(公告)号：US20240004297A1

公开(公告)日：2024-01-04

申请号：US18218193

申请日：2023-07-05

Applicant: JSR CORPORATION

Inventor： Tatsuya KASAI ,  Ayaka Furusawa ,  Kazunori Sakai ,  Ryuichi Serizawa

IPC: G03F7/11 ,  C08G77/04 ,  H01L21/027

CPC classification number: G03F7/11 ,  C08G77/04 ,  H01L21/0274 ,  C08G77/80

Abstract: A composition includes: a solvent; and a compound including: at least one structural unit selected from the group consisting of a structural unit represented by formula (1-1) and a structural unit represented by formula (1-2); and a structural unit represented by formula (2-1). X is a monovalent organic group other than an alkoxy group, the monovalent organic group having 1 to 20 carbon atoms and having at least one fluorine atom; Y is a monovalent organic group having 1 to 20 carbon atoms, a hydroxy group, or a halogen atom; R0 is a substituted or unsubstituted divalent hydrocarbon group having 1 to 20 carbon atoms; R1 is a monovalent organic group having 1 to 20 carbon atoms and having no fluorine atom, a hydroxy group, a hydrogen atom, or a halogen atom; and R2 is a substituted or unsubstituted divalent hydrocarbon group having 1 to 20 carbon atoms.