公开(公告)号：US06727656B1

公开(公告)日：2004-04-27

申请号：US10088326

申请日：2002-06-18

申请人： Jacques Pelletier ,  Ana Lacoste ,  Thierry Léon Lagarde ,  Michel Moisan ,  Yves Alban-Marie Arnal ,  Zenon Zakrzewski

发明人： Jacques Pelletier ,  Ana Lacoste ,  Thierry Léon Lagarde ,  Michel Moisan ,  Yves Alban-Marie Arnal ,  Zenon Zakrzewski

IPC分类号： H01J724

CPC分类号： H01J37/32211 ,  H01J37/32192 ,  H01J37/32311 ,  H01P5/16

摘要： The invention concerns a system including a microwave generator and a rectangular guide connected with the generator. The system is adapted to operate in fundamental (H10) or transverse electrical (TE10) mode, and associated with means providing a standing wave pattern. The system also includes many power connectors arranged in the guide at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator power. The power connectors are adjusted so that the sum of their reduced admittance levels brought to the splitter input formed by the guide is in a single unit and many sources, respectively connected to a connector of the guide, via insulating means ensuring a power transmission of the connector to the source without reflecting towards the connector and a device adapting impedance of each source, located downstream of the insulating means, between the latter and associated source.

摘要翻译： 本发明涉及一种包括微波发生器和与发生器连接的矩形导向器的系统。 该系统适于在基本（H10）或横向电（TE10）模式下操作，并且与提供驻波模式的装置相关联。 该系统还包括布置在引导件中的最大振幅区域的许多电力连接器，用于分离发电机功率的电磁场的部件之一。 电源连接器被调节，使得其被引导到由引导件形成的分离器输入的降低的导纳水平的总和是分别连接到引导件的连接器的单个单元和许多源，经由绝缘装置确保 连接器到源，而不向连接器反射，并且设备适应位于绝缘装置下游的源的阻抗，在后者和相关源之间。

公开(公告)号：US07574974B2

公开(公告)日：2009-08-18

申请号：US10516998

申请日：2003-06-03

申请人： Thierry Léon Lagarde ,  Ana Lacoste ,  Jacques Pelletier ,  Yves Alban-Marie Arnal

发明人： Thierry Léon Lagarde ,  Ana Lacoste ,  Jacques Pelletier ,  Yves Alban-Marie Arnal

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： H01J37/32211 ,  H01J37/32192 ,  H01J37/32678 ,  H05H1/46

摘要： The invention relates to a device for the production of a plasma (16) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator (4) of microwave energy, one of the ends of which is connected to a production source (7) of microwave energy, the other end (8) of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall (3) of the housing, each applicator (4) having a central core (5) which is essentially flush with the wall of the housing. The central core and the thickness of the wall (3) of the housing are separated by a space (6) coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (14), such that said material is essentially flush with the level of the wall of the housing.

摘要翻译： 本发明涉及一种用于在壳体内生产等离子体（16）的装置，包括用于在微波光谱中产生能量的装置，用于激发等离子体，所述装置包括至少一个具有同轴的等离子体激发装置 微波能量的施加器（4），其一端连接到微波能量的生产源（7），另一端（8）被引导到在壳体内被激发的气体。 该装置的特征在于，每个基本等离子体激发装置布置在壳体的壁（3）中，每个施加器（4）具有基本上与壳体的壁齐平的中心芯（5）。 壳体的壁（3）的中心芯和厚度由与中心芯同轴的空间（6）分开，所述空间至少在每个施加器的端部由介电材料（14）完全填充 ），使得所述材料基本上与壳体的壁的水平面齐平。