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12 条记录 (耗时 0.024 秒)

    High speed substrate aligner apparatus
    1.
    发明申请
    High speed substrate aligner apparatus 有权

    公开(公告)号：US20060245846A1

    公开(公告)日：2006-11-02

    申请号：US11093479

    申请日：2005-03-30

    申请人： Jairo Moura ,  Martin Hosek ,  Todd Bottomley ,  Ulysses Gilchrist

    发明人： Jairo Moura ,  Martin Hosek ,  Todd Bottomley ,  Ulysses Gilchrist

    IPC分类号： H01L21/677

    CPC分类号： H01L21/681 ,  Y10S414/136 ,  Y10S414/141

    摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

    High speed substrate aligner apparatus
    2.
    发明申请
    High speed substrate aligner apparatus 有权

    公开(公告)号：US20060222477A1

    公开(公告)日：2006-10-05

    申请号：US11179745

    申请日：2005-07-11

    申请人： Jairo Moura ,  Martin Hosek ,  Todd Bottomley ,  Ulysses Gilchrist

    发明人： Jairo Moura ,  Martin Hosek ,  Todd Bottomley ,  Ulysses Gilchrist

    IPC分类号： H01L21/677

    CPC分类号： H01L21/681 ,  H01L21/67748 ,  H01L21/68 ,  H01L21/682 ,  H01L21/68707 ,  H01L21/68728 ,  H01L21/68785 ,  H01L21/68792

    摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

    POSITION FEEDBACK FOR SELF BEARING MOTOR
    6.
    发明申请
    POSITION FEEDBACK FOR SELF BEARING MOTOR 审中-公开
    自轴承电机的位置反馈

    公开(公告)号：US20110025310A1

    公开(公告)日：2011-02-03

    申请号：US12901146

    申请日：2010-10-08

    申请人： Jairo Moura ,  Martin Hosek ,  Jay Krishnasamy ,  Jeff Paranay

    发明人： Jairo Moura ,  Martin Hosek ,  Jay Krishnasamy ,  Jeff Paranay

    IPC分类号： G01D5/12

    CPC分类号： G01D5/147 ,  G01D5/2451

    摘要： A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.

    摘要翻译： 感测机构包括磁源，磁通量传感器，安装有磁源和磁通传感器的传感器背衬和铁磁目标，其中磁源，磁通量传感器和铁磁性靶位于其上以形成磁性 从磁源到目标的电路，从目标到传感器，并通过传感器背衬返回到磁源。

    Position sensor system
    7.
    发明授权
    Position sensor system 有权
    位置传感器系统

    公开(公告)号：US07834618B2

    公开(公告)日：2010-11-16

    申请号：US12163984

    申请日：2008-06-27

    申请人： Jairo Moura ,  Martin Hosek ,  Jay Krishnasamy ,  Jeff Paranay

    发明人： Jairo Moura ,  Martin Hosek ,  Jay Krishnasamy ,  Jeff Paranay

    IPC分类号： G01B7/14 ,  G01B7/30

    CPC分类号： G01D5/147 ,  G01D5/2451

    摘要： A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.

    摘要翻译： 感测机构包括磁源，磁通量传感器，安装有磁源和磁通传感器的传感器背衬和铁磁目标，其中磁源，磁通量传感器和铁磁性靶位于其上以形成磁性 从磁源到目标的电路，从目标到传感器，并通过传感器背衬返回到磁源。

    MOTOR STATOR WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS
    8.
    发明申请
    MOTOR STATOR WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS 有权
    具有提升能力和降低加固特性的电机定子

    公开(公告)号：US20090033173A1

    公开(公告)日：2009-02-05

    申请号：US12163993

    申请日：2008-06-27

    申请人： Jairo Moura ,  Jay Krishnasamy ,  Martin Hosek

    发明人： Jairo Moura ,  Jay Krishnasamy ,  Martin Hosek

    IPC分类号： H02K1/12

    CPC分类号： H02K29/03 ,  H02K7/09

    摘要： A motor includes a stator and a rotor, equipped to be movable in at least a first direction relative to the stator, the rotor operably interfacing the stator so that a motor force is generated in a first direction, where the stator comprises an anti-cogging element configured to generate anti-cogging forces on the rotor in at least the first direction and a second direction at an angle to the first direction.

    摘要翻译： 电动机包括定子和转子，其被配置为能够相对于定子在至少第一方向上移动，转子可操作地连接定子，使得在第一方向上产生电动机的力，其中定子包括抗齿槽 元件，其构造成在至少第一方向和与第一方向成一定角度的第二方向上在转子上产生抗齿槽力。

    POSITION FEEDBACK FOR SELF BEARING MOTOR
    9.
    发明申请
    POSITION FEEDBACK FOR SELF BEARING MOTOR 有权
    自轴承电机的位置反馈

    公开(公告)号：US20090015248A1

    公开(公告)日：2009-01-15

    申请号：US12163984

    申请日：2008-06-27

    申请人： Jairo Moura ,  Martin Hosek ,  Jay Krishnasamy ,  Jeff Paranay

    发明人： Jairo Moura ,  Martin Hosek ,  Jay Krishnasamy ,  Jeff Paranay

    IPC分类号： G01B7/14

    CPC分类号： G01D5/147 ,  G01D5/2451

    摘要： A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.

    摘要翻译： 感测机构包括磁源，磁通量传感器，安装有磁源和磁通传感器的传感器背衬和铁磁目标，其中磁源，磁通量传感器和铁磁性靶位于其上以形成磁性 从磁源到目标的电路，从目标到传感器，并通过传感器背衬返回到磁源。