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公开(公告)号:US20070010898A1
公开(公告)日:2007-01-11
申请号:US11178615
申请日:2005-07-11
申请人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号: G05B19/18
CPC分类号: G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译: 控制系统包括具有主控制器的集群架构,包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分,以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。
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公开(公告)号:US20110118855A1
公开(公告)日:2011-05-19
申请号:US13011970
申请日:2011-01-24
申请人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号: G05B13/04
CPC分类号: G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译: 控制系统包括具有主控制器的集群架构,包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分,以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。
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公开(公告)号:US07904182B2
公开(公告)日:2011-03-08
申请号:US11178615
申请日:2005-07-11
申请人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
CPC分类号: G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译: 控制系统包括具有主控制器的集群架构,包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分,以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。
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公开(公告)号:US09020617B2
公开(公告)日:2015-04-28
申请号:US13011970
申请日:2011-01-24
申请人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人: Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号: G05B15/00 , G05B13/02 , G05B19/18 , G05B19/418 , G05B19/414
CPC分类号: G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译: 控制系统包括具有主控制器的集群架构,包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分,以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。
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公开(公告)号:US20110025310A1
公开(公告)日:2011-02-03
申请号:US12901146
申请日:2010-10-08
申请人: Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
发明人: Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
IPC分类号: G01D5/12
CPC分类号: G01D5/147 , G01D5/2451
摘要: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
摘要翻译: 感测机构包括磁源,磁通量传感器,安装有磁源和磁通传感器的传感器背衬和铁磁目标,其中磁源,磁通量传感器和铁磁性靶位于其上以形成磁性 从磁源到目标的电路,从目标到传感器,并通过传感器背衬返回到磁源。
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公开(公告)号:US07834618B2
公开(公告)日:2010-11-16
申请号:US12163984
申请日:2008-06-27
申请人: Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
发明人: Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
CPC分类号: G01D5/147 , G01D5/2451
摘要: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
摘要翻译: 感测机构包括磁源,磁通量传感器,安装有磁源和磁通传感器的传感器背衬和铁磁目标,其中磁源,磁通量传感器和铁磁性靶位于其上以形成磁性 从磁源到目标的电路,从目标到传感器,并通过传感器背衬返回到磁源。
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7.
公开(公告)号:US20090033173A1
公开(公告)日:2009-02-05
申请号:US12163993
申请日:2008-06-27
申请人: Jairo Moura , Jay Krishnasamy , Martin Hosek
发明人: Jairo Moura , Jay Krishnasamy , Martin Hosek
IPC分类号: H02K1/12
摘要: A motor includes a stator and a rotor, equipped to be movable in at least a first direction relative to the stator, the rotor operably interfacing the stator so that a motor force is generated in a first direction, where the stator comprises an anti-cogging element configured to generate anti-cogging forces on the rotor in at least the first direction and a second direction at an angle to the first direction.
摘要翻译: 电动机包括定子和转子,其被配置为能够相对于定子在至少第一方向上移动,转子可操作地连接定子,使得在第一方向上产生电动机的力,其中定子包括抗齿槽 元件,其构造成在至少第一方向和与第一方向成一定角度的第二方向上在转子上产生抗齿槽力。
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公开(公告)号:US20090015248A1
公开(公告)日:2009-01-15
申请号:US12163984
申请日:2008-06-27
申请人: Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
发明人: Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
IPC分类号: G01B7/14
CPC分类号: G01D5/147 , G01D5/2451
摘要: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
摘要翻译: 感测机构包括磁源,磁通量传感器,安装有磁源和磁通传感器的传感器背衬和铁磁目标,其中磁源,磁通量传感器和铁磁性靶位于其上以形成磁性 从磁源到目标的电路,从目标到传感器,并通过传感器背衬返回到磁源。
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公开(公告)号:US20060245846A1
公开(公告)日:2006-11-02
申请号:US11093479
申请日:2005-03-30
申请人: Jairo Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
发明人: Jairo Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
IPC分类号: H01L21/677
CPC分类号: H01L21/681 , Y10S414/136 , Y10S414/141
摘要: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.
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公开(公告)号:US11002566B2
公开(公告)日:2021-05-11
申请号:US12901146
申请日:2010-10-08
申请人: Martin Hosek , Jairo Moura , Jay Krishnasamy , Jeff Paranay
发明人: Martin Hosek , Jairo Moura , Jay Krishnasamy , Jeff Paranay
摘要: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
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