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公开(公告)号：US08519368B2
公开(公告)日：2013-08-27
申请号：US13054807
申请日：2009-07-21
IPC分类号： H05G2/00
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.
摘要翻译： 本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。 等离子体（15）在至少两个电极（1,2）之间的气态介质中点燃，其中所述气体介质至少部分地由施加到在放电空间中移动的表面的液体材料（6）产生， 至少部分被一个或几个脉冲能量束蒸发。 在所提出的方法和装置中，所述脉冲能量束的脉冲（9）相对于所述表面的移动方向指向至少两个不同的横向位置。 通过这种措施，辐射发射体积扩大，对空间波动的敏感性较低，可以更好地适应任何应用的光学系统的要求。 此外，可以通过该措施来增加光输出功率。
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公开(公告)号：US20110127442A1
公开(公告)日：2011-06-02
申请号：US13054807
申请日：2009-07-21
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.
摘要翻译： 本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。 等离子体（15）在至少两个电极（1,2）之间的气体介质中点燃，其中所述气态介质至少部分地由施加到在放电空间中移动的表面的液体材料（6）产生， 至少部分被一个或几个脉冲能量束蒸发。 在所提出的方法和装置中，所述脉冲能量束的脉冲（9）相对于所述表面的移动方向指向至少两个不同的横向位置。 通过这种措施，辐射发射体积扩大，对空间波动的敏感性较低，可以更好地适应任何应用的光学系统的要求。 此外，可以通过该措施来增加光输出功率。
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公开(公告)号：US20100194313A1
公开(公告)日：2010-08-05
申请号：US12679969
申请日：2008-09-25
CPC分类号： H05B41/245
摘要： The present invention relates to a high voltage electrical connection line (11), in particular for electrically connecting a gas discharge source (10) to a high voltage power source (9). The connection line is formed of a stack of two electrically conductive plates (2) separated by an electrically isolating layer (1). An electrically conductive layer (8) of a material having a higher electrical resistivity than the material of the conductive plates (2) is arranged between said isolating layer (1) and said conductive plates (2). The proposed connection line provides a higher life time when used for connecting a high voltage power source and a pulsed discharge lamp.
摘要翻译： 本发明涉及高压电连接线（11），特别是用于将气体放电源（10）电连接到高压电源（9）。 连接线由两层由电绝缘层（1）分开的导电板（2）形成。 具有比导电板（2）的材料更高的电阻率的材料的导电层（8）被布置在所述隔离层（1）和所述导电板（2）之间。 所提出的连接线在连接高压电源和脉冲放电灯时提供更长的使用寿命。
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公开(公告)号：US20090173896A1
公开(公告)日：2009-07-09
申请号：US11720638
申请日：2005-11-29
申请人： Michael Loeken , Jakob Willi Neff , Juergen Klen , Sven Probst
发明人： Michael Loeken , Jakob Willi Neff , Juergen Klen , Sven Probst
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： The present invention relates to a method of operating an electrical discharge device (12) comprising at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, which electrodes are electrically connected to a power supply (18) and, upon ignition of a first gas discharge (22) between the electrodes (14, 16), transmit an electrical current (1), as a result of which a plasma (24) is produced in a working gas (26), which plasma emits radiation (28), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle (30) into a chamber (32) outside the electrodes (14, 16). In order to prevent erosion at the electrodes (14, 16), it is proposed that the formation of a secondary plasma (34) in the chamber (32) is suppressed by a device (42).
摘要翻译： 本发明涉及一种操作放电装置（12）的方法，该放电装置包括至少一个第一电极（14）和至少一个第二电极（16），该电极与电源（18）电连接 ），并且在电极（14,16）之间的第一气体放电（22）点燃时，传输电流（1），结果在工作气体（26）中产生等离子体（24）， 该等离子体发射辐射（28），特别是经由立体角（30）通过电极（14,16）外部的室（32）中的极紫外线和/或软X射线辐射。 为了防止电极（14,16）的侵蚀，建议通过装置（42）抑制在室（32）中形成二级等离子体（34）。
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公开(公告)号：US08227779B2
公开(公告)日：2012-07-24
申请号：US12747520
申请日：2008-12-16
申请人： Jakob Willi Neff
发明人： Jakob Willi Neff
IPC分类号： H05G2/00
摘要： The present invention relates to a gas discharge source, for generating EUV radiation and/or soft X-radiation, comprising at least two electrode bodies (110,120), of which a first electrode body (110) comprises a rotatably mounted electrode disk (100). The source further comprises a rotary drive (130) for the electrode disk, a device for applying a liquid film of a target material (140) onto a radial outer surface of the electrode disk (100), and a laser that is focussed, within a discharge area (240), onto the radial outer surface of the electrode disk (100) to evaporate target material. The source is characterized by an intermediate space (160) is formed between the electrode bodies, which intermediate space has a reduced width of
摘要翻译： 本发明涉及一种用于产生EUV辐射和/或软X射线的气体放电源，其包括至少两个电极体（110,120），其中第一电极体（110）包括可旋转地安装的电极盘（100） 。 该源还包括用于电极盘的旋转驱动器（130），用于将目标材料（140）的液膜施加到电极盘（100）的径向外表面上的装置，以及聚焦在该电极盘 放电区域（240）放置在电极盘（100）的径向外表面上以蒸发目标材料。 该源的特征在于在电极体之间形成中间空间（160），该中间空间在放电区域（240）的外侧具有小于放电区域的中间空间的小于5mm的宽度。 该源使得能够以简单的方式通过更大的立体角发射所产生的辐射，而不被电极遮蔽。
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6.发明申请METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY 有权用于产生具有增强效率的EUV辐射或软X射线的方法和装置公开(公告)号：US20110248192A1
公开(公告)日：2011-10-13
申请号：US13139601
申请日：2009-12-09
IPC分类号： H05G2/00
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to one or several surface(s) moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device at least two consecutive pulses (9, 18) are applied within a time interval of each electrical discharge onto said surface(s). With this measure, the collectable conversion efficiency is increased compared to the use of only one single energy pulse within each electrical discharge.
摘要翻译： 本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。 等离子体（15）在至少两个电极（1,2）之间的气态介质中点燃，其中所述气体介质至少部分地由施加到移动的一个或多个表面的液体材料（6）产生 在放电空间中并且被一个或多个脉冲能量束至少部分蒸发。 在所提出的方法和装置中，在每个放电到所述表面的时间间隔内施加至少两个连续脉冲（9,18）。 通过这种措施，与在每次放电期间仅使用一个单个能量脉冲相比，可收集的转换效率提高。
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公开(公告)号：US07630475B2
公开(公告)日：2009-12-08
申请号：US11914773
申请日：2006-05-08
申请人： Jakob Willi Neff , Ralf Pruemmer
发明人： Jakob Willi Neff , Ralf Pruemmer
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , G03F7/70033 , H05G2/005
摘要： A gas discharge source for EUV radiation and/or soft X-ray radiation is arranged in a vacuum chamber and includes at least two electrodes, each with a circular periphery and rotatably mounted for rotation. At one spatial position, the electrodes have a small spacing for the ignition of a gas discharge and are each connected to a reservoir for a liquid, electrically conductive material. During rotation, a liquid film of the electrically conductive material forms over the circular periphery of the electrodes and a flow of current to the electrodes is made possible. The electrodes connect to the reservoirs via a respective connecting element, wherein a gap is formed between electrode and connecting element over a partial section of the circular periphery of each electrode. The liquid material can penetrate from the reservoir and into the gap during rotation of the electrode via a feed channel formed in the connecting element.
摘要翻译： 用于EUV辐射和/或软X射线辐射的气体放电源布置在真空室中，并且包括至少两个电极，每个电极具有圆形周边并可旋转地安装用于旋转。 在一个空间位置处，电极具有用于点燃气体放电的小间隔，并且各自连接到用于液体导电材料的储存器。 在旋转期间，导电材料的液体膜形成在电极的圆周上，并且使电流流向电极成为可能。 电极通过相应的连接元件连接到储存器，其中在电极和连接元件之间在每个电极的圆周边的部分部分上形成间隙。 液体材料可以通过形成在连接元件中的进料通道在电极旋转期间从储存器渗透进入间隙。
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公开(公告)号：US20080187105A1
公开(公告)日：2008-08-07
申请号：US11914773
申请日：2006-05-08
申请人： Jakob Willi Neff , Ralf Pruemmer
发明人： Jakob Willi Neff , Ralf Pruemmer
IPC分类号： H01J35/06
CPC分类号： H05G2/003 , G03F7/70033 , H05G2/005
摘要： The present invention relates to a gas discharge source, in particular for EUV radiation and/or soft X-ray radiation, in which, in a vacuum chamber, at least two electrodes with an at least approximately circular periphery are rotatably mounted for rotation, wherein the electrodes at one spatial position have a small spacing for the ignition of a gas discharge and are in each case connected to a reservoir for a liquid, electrically conductive material in such a way that, during rotation, a liquid film of the electrically conductive material can form over the circular periphery of the electrodes and a flow of current to the electrodes is made possible via the reservoirs. In the present gas discharge source, the electrodes are in each case connected to the reservoirs via a connecting element, by means of which a gap is formed between the electrode and the connecting element over a partial section of the circular periphery of each electrode, into which gap the liquid material can penetrate from the reservoir during rotation of the electrode via at least one feed channel formed in the connecting element.
摘要翻译： 本发明涉及一种气体放电源，特别是用于EUV辐射和/或软X射线辐射，其中在真空室中，具有至少近似圆形周边的至少两个电极可旋转地安装用于旋转，其中 在一个空间位置处的电极具有用于点燃气体放电的小间隔，并且在每种情况下都连接到用于液体导电材料的储存器，使得在旋转期间，导电材料的液体膜 可以在电极的圆周上形成，并且通过储存器使得能够流向电极的电流。 在当前的气体放电源中，电极各自通过连接元件连接到储存器，通过它们在电极和连接元件之间在每个电极的圆周的部分部分上形成间隙，形成 液体材料可以通过形成在连接元件中的至少一个进料通道在电极旋转期间从储存器渗透的间隙。
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公开(公告)号：US08227777B2
公开(公告)日：2012-07-24
申请号：US11720638
申请日：2005-11-29
申请人： Michael Loeken , Jakob Willi Neff , Juergen Klein , Sven Probst
发明人： Michael Loeken , Jakob Willi Neff , Juergen Klein , Sven Probst
IPC分类号： A61N2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： The present invention relates to a method of operating an electrical discharge device (12) comprising at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, which electrodes are electrically connected to a power supply (18) and, upon ignition of a first gas discharge (22) between the electrodes (14, 16), transmit an electrical current (I), as a result of which a plasma (24) is produced in a working gas (26), which plasma emits radiation (28), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle (30) into a chamber (32) outside the electrodes (14, 16). In order to prevent erosion at the electrodes (14, 16), it is proposed that the formation of a secondary plasma (34) in the chamber (32) is suppressed by a device (42).
摘要翻译： 本发明涉及一种操作放电装置（12）的方法，该放电装置包括至少一个第一电极（14）和至少一个第二电极（16），该电极与电源（18）电连接 ），并且在点燃电极（14,16）之间的第一气体放电（22）时，传输电流（I），结果在工作气体（26）中产生等离子体（24）， 该等离子体发射辐射（28），特别是经由立体角（30）通过电极（14,16）外部的室（32）中的极紫外和/或软X射线辐射。 为了防止电极（14,16）的侵蚀，建议通过装置（42）抑制在室（32）中形成二级等离子体（34）。
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公开(公告)号：US07897948B2
公开(公告)日：2011-03-01
申请号：US12439696
申请日：2007-08-29
申请人： Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
发明人： Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
IPC分类号： H05G2/00
摘要： The present invention relates to a plasma discharge lamp for generating EUV radiation and/or soft X-rays by means of an electrically operated discharge. The proposed lamp comprises at least two electrodes arranged in a discharge space at a distance from one another to form a gap which allows the ignition of a plasma (14) in a gaseous medium between said electrodes. A metal applying device applies a metal to a surface of said electrodes. The electrodes are formed of conveyer belts (15) driven to transport the metal to said gap, wherein for each of the electrodes a shaper element (13) is provided at the gap to ensure a proper form and distance of the electrodes at the gap. An energy beam device (4) is adapted to direct an energy beam onto at least one of said surfaces in the gap evaporating said applied metal at least partially thereby producing said gaseous medium. With the proposed plasma discharge lamp high input powers can be achieved at a compact design of the lamp.
摘要翻译： 本发明涉及一种用于通过电动放电产生EUV辐射和/或软X射线的等离子体放电灯。 所提出的灯包括布置在彼此间隔一定距离的放电空间中的至少两个电极，以形成允许在所述电极之间的气态介质中的等离子体（14）点火的间隙。 金属施加装置将金属施加到所述电极的表面。 电极由驱动以将金属输送到所述间隙的输送带（15）形成，其中对于每个电极，在间隙处设置成形元件（13），以确保电极在间隙处的适当形式和距离。 能量束装置（4）适于将能量束引导到间隙中的至少一个所述表面中，至少部分地蒸发所述施加的金属，从而产生所述气体介质。 利用所提出的等离子体放电灯，可以在灯的紧凑设计下实现高输入功率。
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