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1.发明授权公开(公告)号：US06782900B2
公开(公告)日：2004-08-31
申请号：US09951353
申请日：2001-09-13
IPC分类号： B08B300
CPC分类号： C23G5/00 , B08B7/0021 , B81C1/00841 , B81C2201/117 , H01L21/02063 , H01L21/67051 , Y10S134/902
摘要： An apparatus for cleaning a microelectronic substrate includes a pressure chamber, a supply of a process liquid including dense phase CO2 fluidly connected to the chamber and a distilling system. Distilling system includes a still fluidly connected to the chamber and operative to separate CO2 from the process fluid. The distilling system is operative to re-introduce the separated CO2 into the chamber or a further chamber.
摘要翻译： 用于清洁微电子衬底的装置包括压力室，包括流体连接到室的致密相CO 2的处理液的供应和蒸馏系统。 蒸馏系统包括仍然流体连接到室并且用于将CO 2与工艺流体分离。 蒸馏系统可操作以将分离的CO 2重新引入室或另外的室中。
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2.发明授权Apparatus and methods for conserving vapor in a carbon dioxide dry cleaning system 失效用于在二氧化碳干洗系统中保存蒸汽的装置和方法公开(公告)号：US06921420B2
公开(公告)日：2005-07-26
申请号：US10893817
申请日：2004-07-19
CPC分类号： D06F43/08 , D06F43/007
摘要： A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
摘要翻译： 一种在二氧化碳干洗系统中保存二氧化碳蒸汽的方法，该系统采用液态二氧化碳清洗液清洁物品，其中该方法包括将二氧化碳蒸气从洗涤槽中除去至蒸气罐，将二氧化碳蒸气储存在蒸气中 坦克; 并将来自蒸气罐的二氧化碳蒸汽向洗涤槽充电。 该方法可以作为洗涤循环的一部分进行，其包括用洗涤溶液填充洗涤槽，在洗涤槽中清洗要清洗的物品，并将清洗溶液从清洗槽中排出。 还可以使用一种装置来保存二氧化碳干洗系统中的二氧化碳蒸气，二氧化碳干洗系统采用液态二氧化碳清洗液来清洁物品，其中该设备包括用于将待清洗的物品与液体二氧化碳清洗液接触的洗涤槽 ，用于储存液体二氧化碳清洗溶液的工作罐，用于储存二氧化碳蒸气的蒸气罐，提供洗涤槽和蒸汽箱之间流体连通的第一管道系统，其中第一管道系统包括第一管线和第一阀 居住在第一行，以及第二管道系统，其在工作罐和洗涤槽之间提供流体连通。 还提供了用于在收集罐中收集液体二氧化碳的方法和装置。
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公开(公告)号：US06795991B2
公开(公告)日：2004-09-28
申请号：US10696612
申请日：2003-10-29
IPC分类号： D06B3902
CPC分类号： D06F43/08 , D06F43/007
摘要： A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
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公开(公告)号：US06596093B2
公开(公告)日：2003-07-22
申请号：US09951259
申请日：2001-09-13
IPC分类号： B08B300
CPC分类号： B08B7/0021 , C23G5/00 , H01L21/02063 , Y10S134/902 , Y10S438/906
摘要： A method of cleaning and removing water, entrained solutes and particulate matter during a manufacturing process from a microelectronic device such as a resist-coated semiconductor substrate, a MEM's device, or an optoelectronic device comprising the steps of: (a) providing a partially fabricated integrated circuit, MEM's device, or optoelectronic device having water and entrained solutes on the substrate; (b) providing a densified (e.g., liquid or supercritical) carbon dioxide cleaning composition, the cleaning composition comprising carbon dioxide and, optionally but preferably, a cleaning adjunct; (c) immersing the surface portion in the densified carbon dioxide drying composition, and subjecting the densified carbon dioxide drying composition to cyclical phase modulation during at least a portion of the immersing step to thereby facilitating cleaning; and then (d) removing the cleaning composition from the surface portion. Process parameters are preferably controlled so that the drying composition is maintained as a homogeneous composition during the immersing step, the removing step, or both the immersing and removing step, without substantial deposition of the drying/cleaning adjunct or entrained solutes on the substrate.
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公开(公告)号：US06536059B2
公开(公告)日：2003-03-25
申请号：US09760346
申请日：2001-01-12
申请人： James B. McClain , Michael E. Cole
发明人： James B. McClain , Michael E. Cole
IPC分类号： D06F3908
CPC分类号： B08B7/0021 , D06F43/02 , D06F43/08
摘要： The present invention provides a method for the pumpless transfer of liquid carbon dioxide cleaning medium in a carbon dioxide dry cleaning apparatus having a wash vessel, a working vessel, a vapor vessel, and a compressor. The apparatus is preferably overpressurized with an overpressurization gas such as air. The method comprises (a) storing liquid carbon dioxide dry cleaning medium in the working vessel; (b) storing a vapor comprising air and carbon dioxide as a gas under pressure in the vapor vessel; (c) transferring a portion of the vapor from the vapor vessel to the wash vessel, by at least partially equilibrating the pressure between the vapor vessel and the wash vessel, with the wash vessel remaining at a pressure less then that of the working vessel; then (d) transferring at least a portion of the liquid carbon dioxide cleaning medium from the working vessel to the wash vessel by the force of a pressure differential therebetween; (e) washing articles to be cleaned in the wash vessel while concurrently (f) circulating at least a portion of the liquid dry cleaning medium back and forth between the wash vessel to the working vessel.
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公开(公告)号：US06314601B1
公开(公告)日：2001-11-13
申请号：US09405619
申请日：1999-09-24
IPC分类号： D06B3902
CPC分类号： D06F43/007 , B08B7/0021
摘要： A carbon dioxide dry cleaning apparatus and system for the control thereof is disclosed. The apparatus comprises a wash vessel, a working vessel containing a carbon dioxide cleaning medium and operatively associated with the wash vessel, a pump operatively associated with the wash vessel, a condenser connected to the working vessel, a still operatively associated with the working vessel (which still may be a separate still or incorporated into other system components as explained below), a compressor operatively associated with the wash vessel, and a pressure release valve operatively associated with said working vessel. At least one filter is included in the system, but the filter and still may be consolidated together in a single vessel. The apparatus includes a suitable controller which, operating in association with appropriate valves in the apparatus, provides a system that is used to place the apparatus in a cleaning cycle for washing articles therein, a waking cycle separate from the cleaning cycle during which distillation, recharging and other maintenance and preparatory function can be performed, or a resting cycle or resting state for long term periods of idleness.
摘要翻译： 公开了一种二氧化碳干洗设备及其控制系统。 该装置包括洗涤容器，含有二氧化碳清洁介质并与洗涤容器可操作地相关联的工作容器，与洗涤容器操作地相关联的泵，连接到工作容器的冷凝器，与工作容器操作相关联的（ 其仍然可以是单独的或并入如下所述的其它系统部件中），与洗涤容器操作地相关联的压缩机和与所述工作容器操作地相关联的压力释放阀。 系统中至少包括一个过滤器，但是过滤器仍然可以在单个容器中固结在一起。 该设备包括合适的控制器，其与设备中的适当阀相关联地提供用于将设备放置在用于在其中洗涤物品的清洁循环中的系统，与清洁循环分离的清洗循环，在该循环期间进行蒸馏，再充电 可以进行其他维护和准备功能，或者休息周期或休息状态长时间的闲置。
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公开(公告)号：US06666050B2
公开(公告)日：2003-12-23
申请号：US10044382
申请日：2002-01-11
IPC分类号： D06B2318
CPC分类号： D06F43/08 , D06F43/007
摘要： A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
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8.发明授权Methods and apparatus for conserving vapor and collecting liquid carbon dioxide for carbon dioxide dry cleaning 失效用于保存蒸汽和收集液态二氧化碳进行二氧化碳干洗的方法和装置公开(公告)号：US06397421B1
公开(公告)日：2002-06-04
申请号：US09404957
申请日：1999-09-24
IPC分类号： D06B1500
CPC分类号： D06F43/08 , D06F43/007
摘要： A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
摘要翻译： 一种在二氧化碳干洗系统中保存二氧化碳蒸汽的方法，该系统采用液态二氧化碳清洗液清洁物品，其中该方法包括将二氧化碳蒸气从洗涤槽中除去至蒸气罐，将二氧化碳蒸气储存在蒸气中 坦克; 并将来自蒸气罐的二氧化碳蒸汽向洗涤槽充电。 该方法可以作为洗涤循环的一部分进行，其包括用洗涤溶液填充洗涤槽，在洗涤槽中清洗要清洗的物品，并将清洗溶液从清洗槽中排出。 还可以使用一种装置来保存二氧化碳干洗系统中的二氧化碳蒸气，二氧化碳干洗系统采用液态二氧化碳清洗液来清洁物品，其中该设备包括用于将待清洗的物品与液体二氧化碳清洗液接触的洗涤槽 ，用于储存液体二氧化碳清洗溶液的工作罐，用于储存二氧化碳蒸气的蒸气罐，提供洗涤槽和蒸汽箱之间流体连通的第一管道系统，其中第一管道系统包括第一管线和第一阀 居住在第一行，以及第二管道系统，其在工作罐和洗涤槽之间提供流体连通。 还提供了用于在收集罐中收集液体二氧化碳的方法和装置。
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公开(公告)号：US06730612B2
公开(公告)日：2004-05-04
申请号：US10434250
申请日：2003-05-08
申请人： Steven Lee Worm , Michael E. Cole
发明人： Steven Lee Worm , Michael E. Cole
IPC分类号： H01L21302
CPC分类号： H01L21/67051
摘要： A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
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公开(公告)号：US08540831B1
公开(公告)日：2013-09-24
申请号：US13416479
申请日：2012-03-09
申请人： Michael E. Cole
发明人： Michael E. Cole
IPC分类号： B44F1/00
摘要： A method of manufacturing a cell tag incorporating a call sign visible under low light and dark conditions, includes steps of providing a first sheet having peripheral edge portions defining at least one aperture comprising all or part of one or more symbols or characters of the call sign, providing a second sheet having a photoluminescence material or a thermal reflective material, and fixedly attaching the first sheet to the second sheet using a non-heat activated adhesive closely about the peripheral edge portions. The second sheet can have peripheral edge portions defining the at least one aperture therethrough marginally smaller than the aperture or apertures through the first sheet, to be visible through the aperture or apertures of the first sheet, and a third sheet can be attached to be visible through the aperture or apertures of the second sheet, and can include a photoluminescence or thermal reflective material.
摘要翻译： 一种制造包含在低光暗条件下可见的呼号的小区标签的方法包括以下步骤：提供具有限定至少一个孔的周边边缘部分的第一片，所述孔包括呼叫标志的一个或多个符号或字符的全部或部分 提供具有光致发光材料或热反射材料的第二片材，并且使用非热激活粘合剂将周围边缘部分紧密地固定到第二片材上。 第二片可以具有限定穿过第一片的孔或小孔的至少一个孔的外围边缘部分，以便通过第一片的孔或孔可见，并且第三片可以附接到可见 通过第二片的孔或孔，并且可以包括光致发光或热反射材料。
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