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公开(公告)号：US20100297557A1
公开(公告)日：2010-11-25
申请号：US12658615
申请日：2010-02-08
申请人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
发明人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.
摘要翻译： 提供了可以用含水碱性显影剂显影的有机涂料组合物，特别是抗反射涂料组合物，包括在外涂光致抗蚀剂层的显影过程中的一个步骤。 优选的涂料组合物包含包含至少四个不同官能团的四元共聚物。
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公开(公告)号：US09726977B2
公开(公告)日：2017-08-08
申请号：US12658615
申请日：2010-02-08
申请人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
发明人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.
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公开(公告)号：US08940472B2
公开(公告)日：2015-01-27
申请号：US12658614
申请日：2010-02-08
IPC分类号： G03F7/11 , G03F7/16 , G03F7/30 , G03F7/09 , C08F220/36
CPC分类号： G03F7/091 , B05D1/005 , B05D3/0254 , B05D3/06 , B05D5/061 , B05D7/54 , C08F220/36 , C09D5/006 , C09D133/12 , G03F7/11 , G03F7/16 , G03F7/20 , G03F7/322
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
摘要翻译： 提供了包含二烯/亲二烯体反应产物的有机涂料组合物，特别是抗反射涂料组合物。 本发明的优选组合物可用于减少来自衬底的曝光辐射反射回外涂光致抗蚀剂层的反射和/或作为平坦化，保形或通孔填充层的功能。
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