SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

    公开(公告)号:US20240351062A1

    公开(公告)日:2024-10-24

    申请号:US18685640

    申请日:2022-07-14

    CPC classification number: B05C11/1005 B05C9/14 B05D1/002 B05D3/0254

    Abstract: The present application relates to a substrate processing apparatus and a substrate processing method for suppressing cracking and chipping of a laminated substrate manufactured by bonding substrates, and more particularly to a technique of applying a filler to a gap formed between edge portions of the substrates constituting the laminated substrate. The method includes: applying the filler to a gap between an edge portion of the first substrate and an edge portion of the second substrate; curing the applied filler; generating, by an infrared imaging device, an image of an edge portion of the laminated substrate to which the filler is applied; and determining a filling state of the filler applied to the gap between the edge portion of the first substrate and the edge portion of the second substrate based on the image.

    METHOD OF MANUFACTURING A FILM
    4.
    发明公开

    公开(公告)号:US20240307910A1

    公开(公告)日:2024-09-19

    申请号:US18674079

    申请日:2024-05-24

    CPC classification number: B05C5/0245 B05D3/0254 B05D3/0406 G03F7/168

    Abstract: A film manufacturing equipment includes a transporting device, a filtering device, a coating device, a baking device and a blowing device. Transporting device is configured to transport a substrate. The filtering device is configured to filter a solution. The coating device is configured to squeeze and coat the filtered solution on the substrate. The baking device is configured to bake the solution coated on the substrate. The blowing device is configured to blow an air to the baked solution.

    Method of manufacturing a contamination control sheet

    公开(公告)号:US12064788B2

    公开(公告)日:2024-08-20

    申请号:US17594674

    申请日:2019-05-20

    Applicant: DYCEM LIMITED

    Inventor: Mark Dalziel

    CPC classification number: B05D3/12 B05D3/007 B05D3/0254 B05D7/04

    Abstract: The present invention related to a method of manufacturing of a contamination control sheet, the method comprising the steps of: passing a web of support material from a supply roller to a coating station, and applying a coating of polymeric material to one surface of the support material; passing the coated support material through an oven to cure the polymeric material; and passing the coated support material around a cooling roller to a take up roller; characterised in that a nip roller is provided adjacent to the cooling roller so that the coated surface of the support material is pressed onto the cooling roller by the nip roller, and further characterised in that the cooling roller has a surface roughness of 0.2 to 1 Ra.

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