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公开(公告)号：US5261452A
公开(公告)日：1993-11-16
申请号：US858679
申请日：1992-03-27
CPC分类号： G05D11/03 , G01N33/0018 , Y10T137/2521 , Y10T137/2705 , Y10T137/87652 , Y10T137/87684
摘要： An apparatus and method are provided for preparing low concentration gas phase calibration standards. The flows of a standard mixture of impurity in a gas and a dilution gas are controlled by regulating the pressure upstream of respective calibrated orifices. The pressures of the gas flows are regulated such that a critical flow condition is maintained through the orifices. The two flows are then combined to obtain a known dilution of the impurity in the gas.
摘要翻译： 提供了一种用于制备低浓度气相校准标准的装置和方法。 通过调节各校准孔的上游压力来控制气体和稀释气体中杂质的标准混合物的流动。 调节气流的压力，使得通过孔保持临界流动状态。 然后将两个流合并，以获得气体中杂质的已知稀释度。
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公开(公告)号：US4849174A
公开(公告)日：1989-07-18
申请号：US85888
申请日：1987-08-14
IPC分类号： G01N1/00 , G01N33/00 , G05D11/035
CPC分类号： G05D11/035 , G01N33/0006
摘要： A device adapted to generate a gas flow containing a precise amount of impurities. The device comprises a membrane through which an impurity gas peremeates and mixing means to make a mixture of said impurity gas and a vector gas sweeping said membrane. The pressure of said mixture is substantially constant, but adjustable, to enhance the accuracy of the device.
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公开(公告)号：US5324478A
公开(公告)日：1994-06-28
申请号：US931656
申请日：1992-08-17
IPC分类号： G01N33/00 , G05D11/035
CPC分类号： G01N33/0006 , G05D11/035 , Y10T137/2499
摘要： Gas generating apparatus in which a supply of carrier gas is mixed with an impurity gas that permeates through the membrane of an impurity gas generator. A dopant gas is supplied to the impurity gas generator through a pressure controller which operates in response to a pressure monitor that monitors the pressure of the dopant gas supplied to the impurity gas generator. As the monitored pressure of the supplied dopant gas changes, the pressure of that supplied gas likewise changes in a manner which maintains a substantially constant flow rate of the impurity gas through the membrane to be mixed with a carrier gas.
摘要翻译： 气体发生装置，其中载气的供给与渗透通过杂质气体发生器的膜的杂质气体混合。 掺杂剂气体通过压力控制器供应到杂质气体发生器，该压力控制器响应于监测供应给杂质气体发生器的掺杂气体的压力的压力监测器而工作。 随着所提供的掺杂气体的监测压力发生变化，所供给的气体的压力同样以保持通过膜的杂质气体的基本上恒定的流速与载气混合的方式发生变化。
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公开(公告)号：US5259233A
公开(公告)日：1993-11-09
申请号：US690627
申请日：1991-04-24
申请人： Michael D. Brandt
发明人： Michael D. Brandt
IPC分类号： F16K11/087 , G01N33/00 , F16K11/056
CPC分类号： G01N33/0026 , Y10T137/86638 , Y10T137/86839 , Y10T137/87249
摘要： A counterflow valve for switching between flowing gas streams without undesirable interaction of the gas with any dead volume area or non-metallic surfaces or both, which valve contains a four-way double ported ball valve having a first and second input and a first and second output, first and second inlet duct, a back pressure regulator, adjustable flow control orifice and a valve outlet duct.
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