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公开(公告)号：US5261452A
公开(公告)日：1993-11-16
申请号：US858679
申请日：1992-03-27
CPC分类号： G05D11/03 , G01N33/0018 , Y10T137/2521 , Y10T137/2705 , Y10T137/87652 , Y10T137/87684
摘要： An apparatus and method are provided for preparing low concentration gas phase calibration standards. The flows of a standard mixture of impurity in a gas and a dilution gas are controlled by regulating the pressure upstream of respective calibrated orifices. The pressures of the gas flows are regulated such that a critical flow condition is maintained through the orifices. The two flows are then combined to obtain a known dilution of the impurity in the gas.
摘要翻译： 提供了一种用于制备低浓度气相校准标准的装置和方法。 通过调节各校准孔的上游压力来控制气体和稀释气体中杂质的标准混合物的流动。 调节气流的压力，使得通过孔保持临界流动状态。 然后将两个流合并，以获得气体中杂质的已知稀释度。
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公开(公告)号：US06188475B1
公开(公告)日：2001-02-13
申请号：US09389103
申请日：1999-09-02
IPC分类号： G01N110
CPC分类号： G01N21/031 , G01N21/05 , G01N21/15 , G01N2021/151
摘要： Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
摘要翻译： 提供了一种用于吸收光谱学的新颖的在线电池。 电池包括样品区域，光入口和作为相同或分离的端口的光出口。 每个端口与采样区域通信并且包含透光窗口。 具有光反射表面的反射镜面向样品区域，并且提供了有效加热光反射表面的加热器。 该细胞可用于测定样品中分子气体杂质的浓度。 在半导体处理中发现了特殊的适用性。
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公开(公告)号：US5835230A
公开(公告)日：1998-11-10
申请号：US890926
申请日：1997-07-10
CPC分类号： G01N21/276 , G01J3/42 , G01J2003/2866
摘要： A novel method for calibration of a spectroscopic sensor is provided. In the method, a spectroscopic system is provided. The system includes a measurement cell having one or more walls which at least partially enclose a sample region. The cell further includes a light entry port and a light exit port. The light entry port and the light exit port can be the same port or separate ports. Each of the ports contains a light transmissive window through which a light beam passes along an internal light path inside the measurement cell. The system further has an optical chamber which contains a light source for generating the light beam which passes through the light entry port into the cell, and a detector for measuring the light beam exiting the cell through the light exit port. The light beam passes along an external light path inside the optical chamber. In addition, a gas inlet is connected to the optical chamber. A calibration gas stream is introduced into the optical chamber. The calibration gas stream contains a calibrating gas species and a carrier gas. The calibrating gas species is present in the calibration gas stream in a known concentration. A spectroscopy measurement of the calibration gas stream is then performed. The method finds particular applicability in the calibration of an in-line spectroscopic sensor useful in the detection of molecules of interest in a semiconductor processing tool.
摘要翻译： 提供了一种用于校准光谱传感器的新方法。 在该方法中，提供了光谱系统。 该系统包括具有至少部分地包围样品区域的一个或多个壁的测量单元。 电池还包括光入口和光出口。 光入口和光出口可以是相同的端口或单独的端口。 每个端口包含透光窗口，光束通过该透光窗口沿测量单元内部的内部光路传播。 该系统还具有光学室，该光学室包含用于产生通过光入口进入单元的光束的光源，以及用于测量通过光出口离开单元的光束的检测器。 光束通过光学室内的外部光路。 此外，气体入口连接到光学室。 校准气流被引入到光学室中。 校准气流包含校准气体种类和载气。 校正气体种类以已知浓度存在于校准气流中。 然后进行校准气流的光谱测量。 该方法在用于检测半导体加工工具中的分子的在线光谱传感器的校准中具有特别的适用性。
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公开(公告)号：US08932674B2
公开(公告)日：2015-01-13
申请号：US13576016
申请日：2011-02-17
CPC分类号： H01L21/02126 , C23C16/30 , C23C16/401 , C23C16/56 , H01L21/02203 , H01L21/02211 , H01L21/02214 , H01L21/02274
摘要： Disclosed are precursors that are adapted to deposit SiCOH films with dielectric constant and Young's Modulus suitable for future generation dielectric films.
摘要翻译： 公开了适于沉积具有介电常数的SiCOH膜的前体，并且适用于下一代介电膜的杨氏模量。
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公开(公告)号：US08999734B2
公开(公告)日：2015-04-07
申请号：US12721362
申请日：2010-03-10
CPC分类号： C07F7/10 , H01L21/02343 , H01L21/02359
摘要： Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
摘要翻译： 本文公开了可以表现出增强的甲硅烷基化能力的单官能甲硅烷基化化合物。 还公开了合成和使用这些化合物的方法。 最后还公开了确定有效甲硅烷基化的方法。
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公开(公告)号：US08298965B2
公开(公告)日：2012-10-30
申请号：US12553843
申请日：2009-09-03
IPC分类号： H01L21/31
CPC分类号： H01L21/31633 , B05D1/62 , B05D3/0254 , C23C16/401 , C23C16/56 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02274 , H01L21/31695
摘要： Disclosed herein are precursors and methods for their use in the manufacture of semiconductor, photovoltaic, TFT-LCD, or flat panel type devices.
摘要翻译： 本文公开了其用于制造半导体，光伏，TFT-LCD或平板型器件的前体和方法。
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7.发明授权Semiconductor processing system and method for controlling moisture level therein 失效半导体处理系统及其中的水分含量控制方法公开(公告)号：US06442736B1
公开(公告)日：2002-08-27
申请号：US09677885
申请日：2000-10-03
IPC分类号： H01L2100
CPC分类号： C30B33/005 , C23C8/16 , G01N21/3554
摘要： Provided is a novel semiconductor processing system. The system includes a process chamber for treating a semiconductor substrate with one or more process gases comprising water vapor, means for delivering the water vapor or one or more precursors thereof to the process chamber, an exhaust conduit connected to the process chamber, an absorption spectroscopy system for sensing water vapor in a sample region, and a control system which controls water vapor content in the process chamber. Also provided is a method for controlling the water vapor level in a semiconductor process chamber. The system and method allow for measurement and control of the water vapor level in a semiconductor processing chamber in which water vapor is present as a process gas.
摘要翻译： 提供了一种新颖的半导体处理系统。 该系统包括用于用一种或多种包括水蒸气的工艺气体处理半导体衬底的处理室，用于将水蒸气或其一种或多种前体输送到处理室的装置，连接到处理室的排气导管，吸收光谱 用于感测样品区域中的水蒸气的系统，以及控制处理室中水蒸气含量的控制系统。 还提供了一种用于控制半导体处理室中的水蒸汽水平的方法。 该系统和方法允许在存在水蒸气作为处理气体的半导体处理室中测量和控制水蒸汽水平。
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8.发明授权Method and system for preventing deposition on an optical component in a spectroscopic sensor 有权用于防止在光谱传感器中的光学部件上沉积的方法和系统公开(公告)号：US06421127B1
公开(公告)日：2002-07-16
申请号：US09613806
申请日：2000-07-11
申请人： James J. F. McAndrew , Benjamin Jurcik , Carol Schnepper , Ronald Inman , Dmitry Znamensky , Tracey Jacksier
发明人： James J. F. McAndrew , Benjamin Jurcik , Carol Schnepper , Ronald Inman , Dmitry Znamensky , Tracey Jacksier
IPC分类号： G01N2103
CPC分类号： G01J3/42 , B08B17/02 , G01J3/0259 , G01J3/44 , G01N21/15 , G01N2021/151 , G02B27/0006
摘要： Provided are novel methods of preventing deposition on an optical component in an absorption spectroscopy measurement cell. The methods involve performing an absorption spectroscopy measurement of a sample gas introduced into the cell, and introducing a flow of purge gas from a purge gas inlet pipe across a critical surface of the optical element at a velocity effective to prevent deposition on the critical surface. The gas inlet is disposed adjacent said critical surface. Also provided are devices for practicing the inventive method, measurement cells useful in absorption spectroscopy measurements, apparatuses for performing an absorption spectroscopy measurement and semiconductor processing apparatuses. The invention allows for the performance of accurate spectroscopic measurements. Because deposits are prevented from forming on the surface of an optical element, interference therefrom can effectively be avoided.
摘要翻译： 提供了防止在吸收光谱测量单元中的光学部件上沉积的新方法。 所述方法包括对导入到电池中的样品气体进行吸收光谱测量，并以有效防止沉积在临界表面上的速度，将来自吹扫气体入口管的净化气体流引导到光学元件的临界表面。 气体入口邻近所述临界表面设置。 还提供了用于实施本发明方法的装置，用于吸收光谱测量的测量单元，用于执行吸收光谱测量的装置和半导体处理装置。 本发明允许进行精确的光谱测量。 由于防止在光学元件的表面上形成沉积物，因此可以有效地避免与其的干涉。
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公开(公告)号：US5991696A
公开(公告)日：1999-11-23
申请号：US893539
申请日：1997-07-11
申请人： James J. F. McAndrew
发明人： James J. F. McAndrew
CPC分类号： G01N21/39 , G01N2015/0046 , G01N2021/354 , G01N2021/399 , G01N21/3554
摘要： Provided is a novel method for intelligent data acquisition in a measurement system. The method comprises the following steps: (a) providing a measurement system; (b) performing a measurement with the measurement system, thereby obtaining a measurement result; (c) writing the measurement result to a data file on a first storage device; (d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of measurement results in the data file; (e) generating one or more summary values from the measurement results; (f) saving the one or more summary values to a summary file on the first storage device or on a second storage device; (g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared; and (h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present. Particular applicability is found in in-situ moisture concentration measurement in a semiconductor processing apparatus.
摘要翻译： 提供了一种用于测量系统中智能数据采集的新颖方法。 该方法包括以下步骤：（a）提供测量系统; （b）用测量系统进行测量，从而获得测量结果; （c）将测量结果写入第一存储设备上的数据文件; （d）重复步骤（b）和（c）一次或多次，从而在数据文件中累积多个测量结果; （e）从测量结果生成一个或多个汇总值; （f）将所述一个或多个汇总值保存到所述第一存储设备或第二存储设备上的汇总文件; （g）将所述一个或多个概要值中的至少一个与对应于所述至少一个汇总值的相应的预定标准汇总值进行比较，其中所述比较是基于正在比较的每个汇总值的预定义不等式进行的; 以及（h）如果在步骤（g）中比较的所述至少一个概要值中的一个或多个，超出了如下定义的可接受范围，则将数据文件保存到第一存储设备，第二存储设备或第三存储设备中： 和/或可选地，当触发器指示条件存在时。 在半导体处理装置中的原位水分浓度测定中发现了特定的适用性。
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