Method for Imprinting and Erasing Amorphous Metal Alloys
    3.
    发明申请
    Method for Imprinting and Erasing Amorphous Metal Alloys 有权
    非晶态金属合金印刷和擦除方法

    公开(公告)号:US20100098967A1

    公开(公告)日:2010-04-22

    申请号:US12526792

    申请日:2008-02-13

    IPC分类号: B32B3/30 B22D23/00

    摘要: The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

    摘要翻译: 本发明涉及使用非晶金属材料进行压印光刻的材料,方法和装置。 非晶金属材料可用作压印介质,并且在图案转移过程期间施加热塑性成形工艺以在非晶金属层中产生微米级和纳米尺度图案。 图案转印是直接掩模压花或通过连续纳米压痕工艺的形式。 还公开了重写过程,其包括通过第二热塑性成型工艺实现的擦除机构。 非晶金属材料也可以直接用作压印光刻中的压花模具,以允许高体积压印纳米制造。 本发明还包括在单独的表面张力的作用下平滑表面的方法。

    Method for imprinting and erasing amorphous metal alloys
    5.
    发明授权
    Method for imprinting and erasing amorphous metal alloys 有权
    印刷和擦除非晶态金属合金的方法

    公开(公告)号:US08641839B2

    公开(公告)日:2014-02-04

    申请号:US12526792

    申请日:2008-02-13

    IPC分类号: B22D21/00 B22D19/16 C22C45/00

    摘要: The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

    摘要翻译: 本发明涉及使用非晶金属材料进行压印光刻的材料,方法和装置。 非晶金属材料可用作压印介质,并且在图案转移过程期间施加热塑性成形工艺以在非晶金属层中产生微米级和纳米尺度图案。 图案转印是直接掩模压花或通过连续纳米压痕工艺的形式。 还公开了重写过程,其包括通过第二热塑性成型工艺实现的擦除机构。 非晶金属材料也可以直接用作压印光刻中的压花模具,以允许高体积压印纳米制造。 本发明还包括在单独的表面张力的作用下平滑表面的方法。