Apparatus for parallel detection of the behaviour of mechanical micro-oscillators
    1.
    发明授权
    Apparatus for parallel detection of the behaviour of mechanical micro-oscillators 失效
    用于并行检测机械微振荡器行为的装置

    公开(公告)号:US07173714B2

    公开(公告)日:2007-02-06

    申请号:US10415984

    申请日:2001-11-05

    IPC分类号: G01B9/02

    摘要: The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample (21). The amplitude and the phase of resonance of micro-oscillators (12) are measured with optical means. The invention is characterised in that a source (1) is active during a fraction 1/n of the period (n being an integer) and of variable phase p/n of the period (p being an integer). Interferences are produced between light beams generated by reflection of incident light beams (7) and (8) on the micro-oscillators (12). Periodically the micro-oscillators (12) are displaced by means. The value of the parameter p (p being an integer) is varied and N elementary measurements are integrated to obtain a measurement representing each of the values of p. The phase and amplitude of each micro-oscillator (12) are calculated on the basis of the representative data obtained for each value of p and this for a large number of accumulations. The invention is applicable in the field of nanotechnologies.

    摘要翻译: 本发明涉及用于并行检测与样品(21)相互作用的机械微振荡器的行为的装置。 用光学方法测量微振荡器(12)的振幅和相位。 本发明的特征在于,在周期(n为整数)的分数1 / n和周期的可变相位p / n(p为整数)的数量级中,源(1)是有效的。 在微振荡器(12)上的入射光束(7)和(8)的反射产生的光束之间产生干扰。 定期地,微振荡器(12)通过装置移位。 参数p(p是整数)的值是变化的,并且积分N个基本测量值以获得表示p的每个值的测量值。 每个微振荡器(12)的相位和振幅都是根据为每个p值获得的代表性数据计算出来的,而且这对于大量的累加来计算。 本发明适用于纳米技术领域。