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公开(公告)号：US20110255181A1
公开(公告)日：2011-10-20
申请号：US13170951
申请日：2011-06-28
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US20090168207A1
公开(公告)日：2009-07-02
申请号：US12400965
申请日：2009-03-10
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US07265917B2
公开(公告)日：2007-09-04
申请号：US10966388
申请日：2004-10-15
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US08488261B2
公开(公告)日：2013-07-16
申请号：US13170951
申请日：2011-06-28
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
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公开(公告)号：US07768723B2
公开(公告)日：2010-08-03
申请号：US12400965
申请日：2009-03-10
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US20070297074A1
公开(公告)日：2007-12-27
申请号：US11895990
申请日：2007-08-28
IPC分类号： G02B7/14
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
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公开(公告)号：US20050134972A1
公开(公告)日：2005-06-23
申请号：US10966388
申请日：2004-10-15
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US07995296B2
公开(公告)日：2011-08-09
申请号：US12830913
申请日：2010-07-06
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US20100271716A1
公开(公告)日：2010-10-28
申请号：US12830913
申请日：2010-07-06
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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公开(公告)号：US07515363B2
公开(公告)日：2009-04-07
申请号：US11895990
申请日：2007-08-28
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译： 用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。
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